11/13/2012	10:20:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	10:20:17 AM	Recipe started at 10:20 AM
11/13/2012	10:20:17 AM	Helium valve closed
11/13/2012	10:20:17 AM	H2 valve closed
11/13/2012	10:20:17 AM	BCl3 valve closed
11/13/2012	10:20:17 AM	PH3 valve closed
11/13/2012	10:20:17 AM	SiCl4 pre valve closed
11/13/2012	10:20:17 AM	SiCl4 post valve closed
11/13/2012	10:20:17 AM	Main Vac valve closed
11/13/2012	10:20:17 AM	Bubbler valve closed
11/13/2012	10:20:17 AM	Bypass valve opened
11/13/2012	10:20:17 AM	Helium MFC set to  0.000000
11/13/2012	10:20:17 AM	H2 MFC set to  0.000000
11/13/2012	10:20:17 AM	BCl3 MFC set to  0.000000
11/13/2012	10:20:17 AM	PH3 MFC set to  0.000000
11/13/2012	10:20:17 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:20:17 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:20:18 AM	Tube furnace set to 0
11/13/2012	10:36:27 AM	Helium valve closed
11/13/2012	10:36:27 AM	H2 valve closed
11/13/2012	10:36:27 AM	BCl3 valve closed
11/13/2012	10:36:27 AM	PH3 valve closed
11/13/2012	10:36:27 AM	SiCl4 pre valve closed
11/13/2012	10:36:27 AM	SiCl4 post valve closed
11/13/2012	10:36:27 AM	Main Vac valve closed
11/13/2012	10:36:27 AM	Bubbler valve closed
11/13/2012	10:36:27 AM	Bypass valve opened
11/13/2012	10:36:27 AM	Helium MFC set to  0.000000
11/13/2012	10:36:27 AM	H2 MFC set to  0.000000
11/13/2012	10:36:27 AM	BCl3 MFC set to  0.000000
11/13/2012	10:36:27 AM	PH3 MFC set to  0.000000
11/13/2012	10:36:27 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:36:27 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:36:27 AM	Tube furnace set to 0
11/13/2012	10:36:59 AM	Helium valve closed
11/13/2012	10:36:59 AM	H2 valve closed
11/13/2012	10:36:59 AM	BCl3 valve closed
11/13/2012	10:36:59 AM	PH3 valve closed
11/13/2012	10:36:59 AM	SiCl4 pre valve closed
11/13/2012	10:36:59 AM	SiCl4 post valve closed
11/13/2012	10:36:59 AM	Bypass valve closed
11/13/2012	10:36:59 AM	Bubbler valve closed
11/13/2012	10:36:59 AM	Main Vac valve opened
11/13/2012	10:36:59 AM	Helium MFC set to  0.000000
11/13/2012	10:36:59 AM	H2 MFC set to  0.000000
11/13/2012	10:36:59 AM	BCl3 MFC set to  0.000000
11/13/2012	10:36:59 AM	PH3 MFC set to  0.000000
11/13/2012	10:36:59 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:36:59 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:36:59 AM	Tube furnace set to 0
11/13/2012	10:37:00 AM	Run finished at 10:37 AM
11/13/2012	10:37:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	10:43:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2012	10:43:10 AM	Recipe started at 10:43 AM
11/13/2012	10:43:10 AM	Helium valve closed
11/13/2012	10:43:10 AM	H2 valve closed
11/13/2012	10:43:10 AM	BCl3 valve closed
11/13/2012	10:43:10 AM	PH3 valve closed
11/13/2012	10:43:10 AM	SiCl4 pre valve closed
11/13/2012	10:43:10 AM	SiCl4 post valve closed
11/13/2012	10:43:10 AM	Main Vac valve closed
11/13/2012	10:43:10 AM	Bypass valve closed
11/13/2012	10:43:10 AM	Bubbler valve closed
11/13/2012	10:43:10 AM	Helium MFC set to  0.000000
11/13/2012	10:43:10 AM	H2 MFC set to  0.000000
11/13/2012	10:43:10 AM	BCl3 MFC set to  0.000000
11/13/2012	10:43:10 AM	PH3 MFC set to  0.000000
11/13/2012	10:43:10 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:43:10 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:43:11 AM	Tube furnace set to 0
11/13/2012	10:43:14 AM	H2 valve closed
11/13/2012	10:43:14 AM	BCl3 valve closed
11/13/2012	10:43:14 AM	PH3 valve closed
11/13/2012	10:43:14 AM	SiCl4 pre valve closed
11/13/2012	10:43:14 AM	SiCl4 post valve closed
11/13/2012	10:43:14 AM	Main Vac valve closed
11/13/2012	10:43:14 AM	Bypass valve closed
11/13/2012	10:43:14 AM	Bubbler valve closed
11/13/2012	10:43:14 AM	Helium valve opened
11/13/2012	10:43:14 AM	Helium MFC set to  500.000000
11/13/2012	10:43:14 AM	H2 MFC set to  0.000000
11/13/2012	10:43:14 AM	BCl3 MFC set to  0.000000
11/13/2012	10:43:14 AM	PH3 MFC set to  0.000000
11/13/2012	10:43:14 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:43:14 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:43:14 AM	Tube furnace set to 0
11/13/2012	10:44:15 AM	Helium valve closed
11/13/2012	10:44:15 AM	H2 valve closed
11/13/2012	10:44:15 AM	BCl3 valve closed
11/13/2012	10:44:15 AM	PH3 valve closed
11/13/2012	10:44:15 AM	SiCl4 pre valve closed
11/13/2012	10:44:15 AM	SiCl4 post valve closed
11/13/2012	10:44:15 AM	Main Vac valve closed
11/13/2012	10:44:15 AM	Bypass valve closed
11/13/2012	10:44:15 AM	Bubbler valve closed
11/13/2012	10:44:15 AM	Helium MFC set to  0.000000
11/13/2012	10:44:15 AM	H2 MFC set to  0.000000
11/13/2012	10:44:15 AM	BCl3 MFC set to  0.000000
11/13/2012	10:44:15 AM	PH3 MFC set to  0.000000
11/13/2012	10:44:15 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:44:15 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:44:16 AM	Tube furnace set to 0
11/13/2012	10:44:17 AM	Run finished at 10:44 AM
11/13/2012	10:44:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2012	10:48:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	10:48:46 AM	Recipe started at 10:48 AM
11/13/2012	10:48:46 AM	Helium valve closed
11/13/2012	10:48:46 AM	H2 valve closed
11/13/2012	10:48:46 AM	BCl3 valve closed
11/13/2012	10:48:46 AM	PH3 valve closed
11/13/2012	10:48:46 AM	SiCl4 pre valve closed
11/13/2012	10:48:46 AM	SiCl4 post valve closed
11/13/2012	10:48:46 AM	Main Vac valve closed
11/13/2012	10:48:46 AM	Bubbler valve closed
11/13/2012	10:48:46 AM	Bypass valve opened
11/13/2012	10:48:46 AM	Helium MFC set to  0.000000
11/13/2012	10:48:46 AM	H2 MFC set to  0.000000
11/13/2012	10:48:46 AM	BCl3 MFC set to  0.000000
11/13/2012	10:48:46 AM	PH3 MFC set to  0.000000
11/13/2012	10:48:46 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:48:46 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:48:46 AM	Tube furnace set to 0
11/13/2012	10:49:55 AM	Helium valve closed
11/13/2012	10:49:55 AM	H2 valve closed
11/13/2012	10:49:55 AM	BCl3 valve closed
11/13/2012	10:49:55 AM	PH3 valve closed
11/13/2012	10:49:55 AM	SiCl4 pre valve closed
11/13/2012	10:49:55 AM	SiCl4 post valve closed
11/13/2012	10:49:55 AM	Main Vac valve closed
11/13/2012	10:49:55 AM	Bubbler valve closed
11/13/2012	10:49:55 AM	Bypass valve opened
11/13/2012	10:49:55 AM	Helium MFC set to  0.000000
11/13/2012	10:49:55 AM	H2 MFC set to  0.000000
11/13/2012	10:49:55 AM	BCl3 MFC set to  0.000000
11/13/2012	10:49:55 AM	PH3 MFC set to  0.000000
11/13/2012	10:49:55 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:49:55 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:49:55 AM	Tube furnace set to 0
11/13/2012	10:50:55 AM	Helium valve closed
11/13/2012	10:50:55 AM	H2 valve closed
11/13/2012	10:50:55 AM	BCl3 valve closed
11/13/2012	10:50:55 AM	PH3 valve closed
11/13/2012	10:50:55 AM	SiCl4 pre valve closed
11/13/2012	10:50:55 AM	SiCl4 post valve closed
11/13/2012	10:50:55 AM	Bypass valve closed
11/13/2012	10:50:55 AM	Bubbler valve closed
11/13/2012	10:50:55 AM	Main Vac valve opened
11/13/2012	10:50:55 AM	Helium MFC set to  0.000000
11/13/2012	10:50:55 AM	H2 MFC set to  0.000000
11/13/2012	10:50:55 AM	BCl3 MFC set to  0.000000
11/13/2012	10:50:55 AM	PH3 MFC set to  0.000000
11/13/2012	10:50:55 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:50:55 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:50:55 AM	Tube furnace set to 0
11/13/2012	10:50:56 AM	Run finished at 10:50 AM
11/13/2012	10:50:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	10:55:08 AM	Main Vac valve closed
11/13/2012	10:55:30 AM	Main Vac valve opened
11/13/2012	10:56:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/13/2012	10:56:15 AM	Recipe started at 10:56 AM
11/13/2012	10:56:15 AM	Helium valve closed
11/13/2012	10:56:15 AM	H2 valve closed
11/13/2012	10:56:15 AM	BCl3 valve closed
11/13/2012	10:56:15 AM	PH3 valve closed
11/13/2012	10:56:15 AM	SiCl4 pre valve closed
11/13/2012	10:56:15 AM	SiCl4 post valve closed
11/13/2012	10:56:15 AM	Main Vac valve closed
11/13/2012	10:56:15 AM	Bubbler valve closed
11/13/2012	10:56:15 AM	Bypass valve opened
11/13/2012	10:56:15 AM	Helium MFC set to  0.000000
11/13/2012	10:56:15 AM	H2 MFC set to  0.000000
11/13/2012	10:56:15 AM	BCl3 MFC set to  0.000000
11/13/2012	10:56:15 AM	PH3 MFC set to  0.000000
11/13/2012	10:56:15 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:56:15 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:56:15 AM	Tube furnace set to 0
11/13/2012	10:56:16 AM	Helium valve closed
11/13/2012	10:56:16 AM	H2 valve closed
11/13/2012	10:56:16 AM	BCl3 valve closed
11/13/2012	10:56:16 AM	PH3 valve closed
11/13/2012	10:56:16 AM	SiCl4 pre valve closed
11/13/2012	10:56:16 AM	SiCl4 post valve closed
11/13/2012	10:56:16 AM	Main Vac valve closed
11/13/2012	10:56:16 AM	Bubbler valve closed
11/13/2012	10:56:16 AM	Bypass valve opened
11/13/2012	10:56:16 AM	Helium MFC set to  0.000000
11/13/2012	10:56:16 AM	H2 MFC set to  0.000000
11/13/2012	10:56:16 AM	BCl3 MFC set to  0.000000
11/13/2012	10:56:16 AM	PH3 MFC set to  0.000000
11/13/2012	10:56:16 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:56:16 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:56:16 AM	Tube furnace set to 0
11/13/2012	10:56:46 AM	Helium valve closed
11/13/2012	10:56:46 AM	H2 valve closed
11/13/2012	10:56:46 AM	BCl3 valve closed
11/13/2012	10:56:46 AM	PH3 valve closed
11/13/2012	10:56:46 AM	SiCl4 pre valve closed
11/13/2012	10:56:46 AM	SiCl4 post valve closed
11/13/2012	10:56:46 AM	Bypass valve closed
11/13/2012	10:56:46 AM	Bubbler valve closed
11/13/2012	10:56:46 AM	Main Vac valve opened
11/13/2012	10:56:46 AM	Helium MFC set to  0.000000
11/13/2012	10:56:46 AM	H2 MFC set to  0.000000
11/13/2012	10:56:46 AM	BCl3 MFC set to  0.000000
11/13/2012	10:56:46 AM	PH3 MFC set to  0.000000
11/13/2012	10:56:46 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:56:46 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:56:46 AM	Tube furnace set to 0
11/13/2012	10:57:16 AM	H2 valve closed
11/13/2012	10:57:16 AM	BCl3 valve closed
11/13/2012	10:57:16 AM	PH3 valve closed
11/13/2012	10:57:16 AM	SiCl4 pre valve closed
11/13/2012	10:57:16 AM	SiCl4 post valve closed
11/13/2012	10:57:16 AM	Bypass valve closed
11/13/2012	10:57:16 AM	Bubbler valve closed
11/13/2012	10:57:16 AM	Helium valve opened
11/13/2012	10:57:16 AM	Main Vac valve opened
11/13/2012	10:57:16 AM	Helium MFC set to  20.000000
11/13/2012	10:57:16 AM	H2 MFC set to  0.000000
11/13/2012	10:57:16 AM	BCl3 MFC set to  0.000000
11/13/2012	10:57:16 AM	PH3 MFC set to  0.000000
11/13/2012	10:57:16 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:57:16 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:57:16 AM	Tube furnace set to 0
11/13/2012	10:57:46 AM	Helium valve closed
11/13/2012	10:57:46 AM	H2 valve closed
11/13/2012	10:57:46 AM	BCl3 valve closed
11/13/2012	10:57:46 AM	PH3 valve closed
11/13/2012	10:57:46 AM	SiCl4 pre valve closed
11/13/2012	10:57:46 AM	SiCl4 post valve closed
11/13/2012	10:57:46 AM	Bypass valve closed
11/13/2012	10:57:46 AM	Bubbler valve closed
11/13/2012	10:57:46 AM	Main Vac valve opened
11/13/2012	10:57:46 AM	Helium MFC set to  0.000000
11/13/2012	10:57:46 AM	H2 MFC set to  0.000000
11/13/2012	10:57:46 AM	BCl3 MFC set to  0.000000
11/13/2012	10:57:46 AM	PH3 MFC set to  0.000000
11/13/2012	10:57:46 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:57:46 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:57:47 AM	Tube furnace set to 0
11/13/2012	10:58:17 AM	H2 valve closed
11/13/2012	10:58:17 AM	BCl3 valve closed
11/13/2012	10:58:17 AM	PH3 valve closed
11/13/2012	10:58:17 AM	SiCl4 pre valve closed
11/13/2012	10:58:17 AM	SiCl4 post valve closed
11/13/2012	10:58:17 AM	Bypass valve closed
11/13/2012	10:58:17 AM	Bubbler valve closed
11/13/2012	10:58:17 AM	Helium valve opened
11/13/2012	10:58:17 AM	Main Vac valve opened
11/13/2012	10:58:17 AM	Helium MFC set to  20.000000
11/13/2012	10:58:17 AM	H2 MFC set to  0.000000
11/13/2012	10:58:17 AM	BCl3 MFC set to  0.000000
11/13/2012	10:58:17 AM	PH3 MFC set to  0.000000
11/13/2012	10:58:17 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:58:17 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:58:17 AM	Tube furnace set to 0
11/13/2012	10:58:47 AM	Helium valve closed
11/13/2012	10:58:47 AM	H2 valve closed
11/13/2012	10:58:47 AM	BCl3 valve closed
11/13/2012	10:58:47 AM	PH3 valve closed
11/13/2012	10:58:47 AM	SiCl4 pre valve closed
11/13/2012	10:58:47 AM	SiCl4 post valve closed
11/13/2012	10:58:47 AM	Bypass valve closed
11/13/2012	10:58:47 AM	Bubbler valve closed
11/13/2012	10:58:47 AM	Main Vac valve opened
11/13/2012	10:58:47 AM	Helium MFC set to  0.000000
11/13/2012	10:58:47 AM	H2 MFC set to  0.000000
11/13/2012	10:58:47 AM	BCl3 MFC set to  0.000000
11/13/2012	10:58:47 AM	PH3 MFC set to  0.000000
11/13/2012	10:58:47 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:58:47 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:58:47 AM	Tube furnace set to 0
11/13/2012	10:59:17 AM	H2 valve closed
11/13/2012	10:59:17 AM	BCl3 valve closed
11/13/2012	10:59:17 AM	PH3 valve closed
11/13/2012	10:59:17 AM	SiCl4 pre valve closed
11/13/2012	10:59:17 AM	SiCl4 post valve closed
11/13/2012	10:59:17 AM	Bypass valve closed
11/13/2012	10:59:17 AM	Bubbler valve closed
11/13/2012	10:59:17 AM	Helium valve opened
11/13/2012	10:59:17 AM	Main Vac valve opened
11/13/2012	10:59:17 AM	Helium MFC set to  20.000000
11/13/2012	10:59:17 AM	H2 MFC set to  0.000000
11/13/2012	10:59:17 AM	BCl3 MFC set to  0.000000
11/13/2012	10:59:17 AM	PH3 MFC set to  0.000000
11/13/2012	10:59:17 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:59:17 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:59:17 AM	Tube furnace set to 0
11/13/2012	10:59:47 AM	Helium valve closed
11/13/2012	10:59:47 AM	H2 valve closed
11/13/2012	10:59:47 AM	BCl3 valve closed
11/13/2012	10:59:47 AM	PH3 valve closed
11/13/2012	10:59:47 AM	SiCl4 pre valve closed
11/13/2012	10:59:47 AM	SiCl4 post valve closed
11/13/2012	10:59:47 AM	Bypass valve closed
11/13/2012	10:59:47 AM	Bubbler valve closed
11/13/2012	10:59:47 AM	Main Vac valve opened
11/13/2012	10:59:47 AM	Helium MFC set to  0.000000
11/13/2012	10:59:47 AM	H2 MFC set to  0.000000
11/13/2012	10:59:47 AM	BCl3 MFC set to  0.000000
11/13/2012	10:59:47 AM	PH3 MFC set to  0.000000
11/13/2012	10:59:47 AM	SiCl4 MFC set to  0.000000
11/13/2012	10:59:47 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	10:59:48 AM	Tube furnace set to 0
11/13/2012	11:00:18 AM	H2 valve closed
11/13/2012	11:00:18 AM	BCl3 valve closed
11/13/2012	11:00:18 AM	PH3 valve closed
11/13/2012	11:00:18 AM	SiCl4 pre valve closed
11/13/2012	11:00:18 AM	SiCl4 post valve closed
11/13/2012	11:00:18 AM	Bypass valve closed
11/13/2012	11:00:18 AM	Bubbler valve closed
11/13/2012	11:00:18 AM	Helium valve opened
11/13/2012	11:00:18 AM	Main Vac valve opened
11/13/2012	11:00:18 AM	Helium MFC set to  20.000000
11/13/2012	11:00:18 AM	H2 MFC set to  0.000000
11/13/2012	11:00:18 AM	BCl3 MFC set to  0.000000
11/13/2012	11:00:18 AM	PH3 MFC set to  0.000000
11/13/2012	11:00:18 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:00:18 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:00:18 AM	Tube furnace set to 0
11/13/2012	11:00:48 AM	Helium valve closed
11/13/2012	11:00:48 AM	H2 valve closed
11/13/2012	11:00:48 AM	BCl3 valve closed
11/13/2012	11:00:48 AM	PH3 valve closed
11/13/2012	11:00:48 AM	SiCl4 pre valve closed
11/13/2012	11:00:48 AM	SiCl4 post valve closed
11/13/2012	11:00:48 AM	Bypass valve closed
11/13/2012	11:00:48 AM	Bubbler valve closed
11/13/2012	11:00:48 AM	Main Vac valve opened
11/13/2012	11:00:48 AM	Helium MFC set to  0.000000
11/13/2012	11:00:48 AM	H2 MFC set to  0.000000
11/13/2012	11:00:48 AM	BCl3 MFC set to  0.000000
11/13/2012	11:00:48 AM	PH3 MFC set to  0.000000
11/13/2012	11:00:48 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:00:48 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:00:48 AM	Tube furnace set to 0
11/13/2012	11:01:18 AM	H2 valve closed
11/13/2012	11:01:18 AM	BCl3 valve closed
11/13/2012	11:01:18 AM	PH3 valve closed
11/13/2012	11:01:18 AM	SiCl4 pre valve closed
11/13/2012	11:01:18 AM	SiCl4 post valve closed
11/13/2012	11:01:18 AM	Bypass valve closed
11/13/2012	11:01:18 AM	Bubbler valve closed
11/13/2012	11:01:18 AM	Helium valve opened
11/13/2012	11:01:18 AM	Main Vac valve opened
11/13/2012	11:01:18 AM	Helium MFC set to  20.000000
11/13/2012	11:01:18 AM	H2 MFC set to  0.000000
11/13/2012	11:01:18 AM	BCl3 MFC set to  0.000000
11/13/2012	11:01:18 AM	PH3 MFC set to  0.000000
11/13/2012	11:01:18 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:01:18 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:01:18 AM	Tube furnace set to 0
11/13/2012	11:01:48 AM	Helium valve closed
11/13/2012	11:01:48 AM	H2 valve closed
11/13/2012	11:01:48 AM	BCl3 valve closed
11/13/2012	11:01:48 AM	PH3 valve closed
11/13/2012	11:01:48 AM	SiCl4 pre valve closed
11/13/2012	11:01:48 AM	SiCl4 post valve closed
11/13/2012	11:01:48 AM	Bypass valve closed
11/13/2012	11:01:48 AM	Bubbler valve closed
11/13/2012	11:01:48 AM	Main Vac valve opened
11/13/2012	11:01:48 AM	Helium MFC set to  0.000000
11/13/2012	11:01:48 AM	H2 MFC set to  0.000000
11/13/2012	11:01:48 AM	BCl3 MFC set to  0.000000
11/13/2012	11:01:48 AM	PH3 MFC set to  0.000000
11/13/2012	11:01:48 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:01:48 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:01:49 AM	Tube furnace set to 0
11/13/2012	11:02:19 AM	H2 valve closed
11/13/2012	11:02:19 AM	BCl3 valve closed
11/13/2012	11:02:19 AM	PH3 valve closed
11/13/2012	11:02:19 AM	SiCl4 pre valve closed
11/13/2012	11:02:19 AM	SiCl4 post valve closed
11/13/2012	11:02:19 AM	Bypass valve closed
11/13/2012	11:02:19 AM	Bubbler valve closed
11/13/2012	11:02:19 AM	Helium valve opened
11/13/2012	11:02:19 AM	Main Vac valve opened
11/13/2012	11:02:19 AM	Helium MFC set to  20.000000
11/13/2012	11:02:19 AM	H2 MFC set to  0.000000
11/13/2012	11:02:19 AM	BCl3 MFC set to  0.000000
11/13/2012	11:02:19 AM	PH3 MFC set to  0.000000
11/13/2012	11:02:19 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:02:19 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:02:19 AM	Tube furnace set to 0
11/13/2012	11:02:49 AM	Helium valve closed
11/13/2012	11:02:49 AM	H2 valve closed
11/13/2012	11:02:49 AM	BCl3 valve closed
11/13/2012	11:02:49 AM	PH3 valve closed
11/13/2012	11:02:49 AM	SiCl4 pre valve closed
11/13/2012	11:02:49 AM	SiCl4 post valve closed
11/13/2012	11:02:49 AM	Bypass valve closed
11/13/2012	11:02:49 AM	Bubbler valve closed
11/13/2012	11:02:49 AM	Main Vac valve opened
11/13/2012	11:02:49 AM	Helium MFC set to  0.000000
11/13/2012	11:02:49 AM	H2 MFC set to  0.000000
11/13/2012	11:02:49 AM	BCl3 MFC set to  0.000000
11/13/2012	11:02:49 AM	PH3 MFC set to  0.000000
11/13/2012	11:02:49 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:02:49 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:02:49 AM	Tube furnace set to 0
11/13/2012	11:03:19 AM	H2 valve closed
11/13/2012	11:03:19 AM	BCl3 valve closed
11/13/2012	11:03:19 AM	PH3 valve closed
11/13/2012	11:03:19 AM	SiCl4 pre valve closed
11/13/2012	11:03:19 AM	SiCl4 post valve closed
11/13/2012	11:03:19 AM	Bypass valve closed
11/13/2012	11:03:19 AM	Bubbler valve closed
11/13/2012	11:03:19 AM	Helium valve opened
11/13/2012	11:03:19 AM	Main Vac valve opened
11/13/2012	11:03:19 AM	Helium MFC set to  20.000000
11/13/2012	11:03:19 AM	H2 MFC set to  0.000000
11/13/2012	11:03:19 AM	BCl3 MFC set to  0.000000
11/13/2012	11:03:19 AM	PH3 MFC set to  0.000000
11/13/2012	11:03:19 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:03:19 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:03:19 AM	Tube furnace set to 0
11/13/2012	11:03:49 AM	Helium valve closed
11/13/2012	11:03:49 AM	H2 valve closed
11/13/2012	11:03:49 AM	BCl3 valve closed
11/13/2012	11:03:49 AM	PH3 valve closed
11/13/2012	11:03:49 AM	SiCl4 pre valve closed
11/13/2012	11:03:49 AM	SiCl4 post valve closed
11/13/2012	11:03:49 AM	Bypass valve closed
11/13/2012	11:03:49 AM	Bubbler valve closed
11/13/2012	11:03:49 AM	Main Vac valve opened
11/13/2012	11:03:49 AM	Helium MFC set to  0.000000
11/13/2012	11:03:49 AM	H2 MFC set to  0.000000
11/13/2012	11:03:49 AM	BCl3 MFC set to  0.000000
11/13/2012	11:03:49 AM	PH3 MFC set to  0.000000
11/13/2012	11:03:49 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:03:49 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:03:50 AM	Tube furnace set to 0
11/13/2012	11:04:20 AM	H2 valve closed
11/13/2012	11:04:20 AM	BCl3 valve closed
11/13/2012	11:04:20 AM	PH3 valve closed
11/13/2012	11:04:20 AM	SiCl4 pre valve closed
11/13/2012	11:04:20 AM	SiCl4 post valve closed
11/13/2012	11:04:20 AM	Bypass valve closed
11/13/2012	11:04:20 AM	Bubbler valve closed
11/13/2012	11:04:20 AM	Helium valve opened
11/13/2012	11:04:20 AM	Main Vac valve opened
11/13/2012	11:04:20 AM	Helium MFC set to  20.000000
11/13/2012	11:04:20 AM	H2 MFC set to  0.000000
11/13/2012	11:04:20 AM	BCl3 MFC set to  0.000000
11/13/2012	11:04:20 AM	PH3 MFC set to  0.000000
11/13/2012	11:04:20 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:04:20 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:04:20 AM	Tube furnace set to 0
11/13/2012	11:04:50 AM	Helium valve closed
11/13/2012	11:04:50 AM	H2 valve closed
11/13/2012	11:04:50 AM	BCl3 valve closed
11/13/2012	11:04:50 AM	PH3 valve closed
11/13/2012	11:04:50 AM	SiCl4 pre valve closed
11/13/2012	11:04:50 AM	SiCl4 post valve closed
11/13/2012	11:04:50 AM	Bypass valve closed
11/13/2012	11:04:50 AM	Bubbler valve closed
11/13/2012	11:04:50 AM	Main Vac valve opened
11/13/2012	11:04:50 AM	Helium MFC set to  0.000000
11/13/2012	11:04:50 AM	H2 MFC set to  0.000000
11/13/2012	11:04:50 AM	BCl3 MFC set to  0.000000
11/13/2012	11:04:50 AM	PH3 MFC set to  0.000000
11/13/2012	11:04:50 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:04:50 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:04:50 AM	Tube furnace set to 0
11/13/2012	11:05:20 AM	H2 valve closed
11/13/2012	11:05:20 AM	BCl3 valve closed
11/13/2012	11:05:20 AM	PH3 valve closed
11/13/2012	11:05:20 AM	SiCl4 pre valve closed
11/13/2012	11:05:20 AM	SiCl4 post valve closed
11/13/2012	11:05:20 AM	Bypass valve closed
11/13/2012	11:05:20 AM	Bubbler valve closed
11/13/2012	11:05:20 AM	Helium valve opened
11/13/2012	11:05:20 AM	Main Vac valve opened
11/13/2012	11:05:20 AM	Helium MFC set to  20.000000
11/13/2012	11:05:20 AM	H2 MFC set to  0.000000
11/13/2012	11:05:20 AM	BCl3 MFC set to  0.000000
11/13/2012	11:05:20 AM	PH3 MFC set to  0.000000
11/13/2012	11:05:20 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:05:20 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:05:20 AM	Tube furnace set to 0
11/13/2012	11:05:50 AM	Helium valve closed
11/13/2012	11:05:50 AM	H2 valve closed
11/13/2012	11:05:50 AM	BCl3 valve closed
11/13/2012	11:05:50 AM	PH3 valve closed
11/13/2012	11:05:50 AM	SiCl4 pre valve closed
11/13/2012	11:05:50 AM	SiCl4 post valve closed
11/13/2012	11:05:50 AM	Bypass valve closed
11/13/2012	11:05:50 AM	Bubbler valve closed
11/13/2012	11:05:50 AM	Main Vac valve opened
11/13/2012	11:05:50 AM	Helium MFC set to  0.000000
11/13/2012	11:05:50 AM	H2 MFC set to  0.000000
11/13/2012	11:05:50 AM	BCl3 MFC set to  0.000000
11/13/2012	11:05:50 AM	PH3 MFC set to  0.000000
11/13/2012	11:05:50 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:05:50 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:05:51 AM	Tube furnace set to 0
11/13/2012	11:06:21 AM	H2 valve closed
11/13/2012	11:06:21 AM	BCl3 valve closed
11/13/2012	11:06:21 AM	PH3 valve closed
11/13/2012	11:06:21 AM	SiCl4 pre valve closed
11/13/2012	11:06:21 AM	SiCl4 post valve closed
11/13/2012	11:06:21 AM	Bypass valve closed
11/13/2012	11:06:21 AM	Bubbler valve closed
11/13/2012	11:06:21 AM	Helium valve opened
11/13/2012	11:06:21 AM	Main Vac valve opened
11/13/2012	11:06:21 AM	Helium MFC set to  20.000000
11/13/2012	11:06:21 AM	H2 MFC set to  0.000000
11/13/2012	11:06:21 AM	BCl3 MFC set to  0.000000
11/13/2012	11:06:21 AM	PH3 MFC set to  0.000000
11/13/2012	11:06:21 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:06:21 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:06:21 AM	Tube furnace set to 0
11/13/2012	11:06:51 AM	Helium valve closed
11/13/2012	11:06:51 AM	H2 valve closed
11/13/2012	11:06:51 AM	BCl3 valve closed
11/13/2012	11:06:51 AM	PH3 valve closed
11/13/2012	11:06:51 AM	SiCl4 pre valve closed
11/13/2012	11:06:51 AM	SiCl4 post valve closed
11/13/2012	11:06:51 AM	Bypass valve closed
11/13/2012	11:06:51 AM	Bubbler valve closed
11/13/2012	11:06:51 AM	Main Vac valve opened
11/13/2012	11:06:51 AM	Helium MFC set to  0.000000
11/13/2012	11:06:51 AM	H2 MFC set to  0.000000
11/13/2012	11:06:51 AM	BCl3 MFC set to  0.000000
11/13/2012	11:06:51 AM	PH3 MFC set to  0.000000
11/13/2012	11:06:51 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:06:51 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:06:51 AM	Tube furnace set to 0
11/13/2012	11:06:52 AM	Run finished at 11:06 AM
11/13/2012	11:06:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/13/2012	11:06:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	11:06:59 AM	Recipe started at 11:06 AM
11/13/2012	11:06:59 AM	Helium valve closed
11/13/2012	11:06:59 AM	H2 valve closed
11/13/2012	11:06:59 AM	BCl3 valve closed
11/13/2012	11:06:59 AM	PH3 valve closed
11/13/2012	11:06:59 AM	SiCl4 pre valve closed
11/13/2012	11:06:59 AM	SiCl4 post valve closed
11/13/2012	11:06:59 AM	Main Vac valve closed
11/13/2012	11:06:59 AM	Bubbler valve closed
11/13/2012	11:06:59 AM	Bypass valve opened
11/13/2012	11:06:59 AM	Helium MFC set to  0.000000
11/13/2012	11:06:59 AM	H2 MFC set to  0.000000
11/13/2012	11:06:59 AM	BCl3 MFC set to  0.000000
11/13/2012	11:06:59 AM	PH3 MFC set to  0.000000
11/13/2012	11:06:59 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:06:59 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:06:59 AM	Tube furnace set to 0
11/13/2012	11:06:59 AM	Helium valve closed
11/13/2012	11:06:59 AM	H2 valve closed
11/13/2012	11:06:59 AM	BCl3 valve closed
11/13/2012	11:06:59 AM	PH3 valve closed
11/13/2012	11:07:00 AM	SiCl4 pre valve closed
11/13/2012	11:07:00 AM	SiCl4 post valve closed
11/13/2012	11:07:00 AM	Main Vac valve closed
11/13/2012	11:07:00 AM	Bubbler valve closed
11/13/2012	11:07:00 AM	Bypass valve opened
11/13/2012	11:07:00 AM	Helium MFC set to  0.000000
11/13/2012	11:07:00 AM	H2 MFC set to  0.000000
11/13/2012	11:07:00 AM	BCl3 MFC set to  0.000000
11/13/2012	11:07:00 AM	PH3 MFC set to  0.000000
11/13/2012	11:07:00 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:07:00 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:07:00 AM	Tube furnace set to 0
11/13/2012	11:08:00 AM	Helium valve closed
11/13/2012	11:08:00 AM	H2 valve closed
11/13/2012	11:08:00 AM	BCl3 valve closed
11/13/2012	11:08:00 AM	PH3 valve closed
11/13/2012	11:08:00 AM	SiCl4 pre valve closed
11/13/2012	11:08:00 AM	SiCl4 post valve closed
11/13/2012	11:08:00 AM	Bypass valve closed
11/13/2012	11:08:00 AM	Bubbler valve closed
11/13/2012	11:08:00 AM	Main Vac valve opened
11/13/2012	11:08:00 AM	Helium MFC set to  0.000000
11/13/2012	11:08:00 AM	H2 MFC set to  0.000000
11/13/2012	11:08:00 AM	BCl3 MFC set to  0.000000
11/13/2012	11:08:00 AM	PH3 MFC set to  0.000000
11/13/2012	11:08:00 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:08:00 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:08:00 AM	Tube furnace set to 0
11/13/2012	11:08:01 AM	Run finished at 11:08 AM
11/13/2012	11:08:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	11:33:10 AM	Main Vac valve closed
11/13/2012	11:33:26 AM	Main Vac valve opened
11/13/2012	11:37:25 AM	Main Vac valve closed
11/13/2012	11:37:39 AM	Main Vac valve opened
11/13/2012	11:39:16 AM	Recipe started at 11:39 AM
11/13/2012	11:39:16 AM	Helium valve closed
11/13/2012	11:39:16 AM	H2 valve closed
11/13/2012	11:39:16 AM	BCl3 valve closed
11/13/2012	11:39:16 AM	PH3 valve closed
11/13/2012	11:39:16 AM	SiCl4 pre valve closed
11/13/2012	11:39:16 AM	SiCl4 post valve closed
11/13/2012	11:39:16 AM	Main Vac valve closed
11/13/2012	11:39:16 AM	Bypass valve closed
11/13/2012	11:39:16 AM	Bubbler valve closed
11/13/2012	11:39:16 AM	Helium MFC set to  0.000000
11/13/2012	11:39:16 AM	H2 MFC set to  0.000000
11/13/2012	11:39:16 AM	BCl3 MFC set to  0.000000
11/13/2012	11:39:16 AM	PH3 MFC set to  0.000000
11/13/2012	11:39:16 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:39:16 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:39:17 AM	Tube furnace set to 0
11/13/2012	11:39:20 AM	Helium valve closed
11/13/2012	11:39:20 AM	BCl3 valve closed
11/13/2012	11:39:20 AM	PH3 valve closed
11/13/2012	11:39:20 AM	SiCl4 pre valve closed
11/13/2012	11:39:20 AM	SiCl4 post valve closed
11/13/2012	11:39:20 AM	Main Vac valve closed
11/13/2012	11:39:20 AM	Bypass valve closed
11/13/2012	11:39:20 AM	Bubbler valve closed
11/13/2012	11:39:20 AM	H2 valve opened
11/13/2012	11:39:20 AM	Helium MFC set to  0.000000
11/13/2012	11:39:20 AM	H2 MFC set to  500.000000
11/13/2012	11:39:20 AM	BCl3 MFC set to  0.000000
11/13/2012	11:39:20 AM	PH3 MFC set to  0.000000
11/13/2012	11:39:20 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:39:20 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:39:20 AM	Tube furnace set to 50
11/13/2012	11:40:36 AM	Helium valve closed
11/13/2012	11:40:36 AM	BCl3 valve closed
11/13/2012	11:40:36 AM	PH3 valve closed
11/13/2012	11:40:36 AM	SiCl4 pre valve closed
11/13/2012	11:40:36 AM	SiCl4 post valve closed
11/13/2012	11:40:36 AM	Main Vac valve closed
11/13/2012	11:40:36 AM	Bypass valve closed
11/13/2012	11:40:36 AM	H2 valve opened
11/13/2012	11:40:36 AM	Bubbler valve opened
11/13/2012	11:40:36 AM	Helium MFC set to  0.000000
11/13/2012	11:40:36 AM	H2 MFC set to  500.000000
11/13/2012	11:40:36 AM	BCl3 MFC set to  0.000000
11/13/2012	11:40:36 AM	PH3 MFC set to  0.000000
11/13/2012	11:40:36 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:40:36 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:40:37 AM	Tube furnace set to 50
11/13/2012	11:40:38 AM	Helium valve closed
11/13/2012	11:40:38 AM	BCl3 valve closed
11/13/2012	11:40:38 AM	PH3 valve closed
11/13/2012	11:40:38 AM	SiCl4 pre valve closed
11/13/2012	11:40:38 AM	SiCl4 post valve closed
11/13/2012	11:40:38 AM	Main Vac valve closed
11/13/2012	11:40:38 AM	Bypass valve closed
11/13/2012	11:40:38 AM	H2 valve opened
11/13/2012	11:40:38 AM	Bubbler valve opened
11/13/2012	11:40:38 AM	Helium MFC set to  0.000000
11/13/2012	11:40:38 AM	H2 MFC set to  500.000000
11/13/2012	11:40:38 AM	BCl3 MFC set to  0.000000
11/13/2012	11:40:38 AM	PH3 MFC set to  0.000000
11/13/2012	11:40:38 AM	SiCl4 MFC set to  0.000000
11/13/2012	11:40:38 AM	Bypass solenoid MFC set to  0.000000
11/13/2012	11:40:38 AM	Tube furnace set to 1000
11/13/2012	12:00:38 PM	Helium valve closed
11/13/2012	12:00:38 PM	BCl3 valve closed
11/13/2012	12:00:38 PM	PH3 valve closed
11/13/2012	12:00:38 PM	Main Vac valve closed
11/13/2012	12:00:38 PM	Bypass valve closed
11/13/2012	12:00:38 PM	H2 valve opened
11/13/2012	12:00:38 PM	SiCl4 pre valve opened
11/13/2012	12:00:38 PM	SiCl4 post valve opened
11/13/2012	12:00:38 PM	Bubbler valve opened
11/13/2012	12:00:38 PM	Helium MFC set to  0.000000
11/13/2012	12:00:38 PM	H2 MFC set to  450.000000
11/13/2012	12:00:38 PM	BCl3 MFC set to  0.000000
11/13/2012	12:00:38 PM	PH3 MFC set to  0.000000
11/13/2012	12:00:38 PM	SiCl4 MFC set to  50.000000
11/13/2012	12:00:38 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	12:00:38 PM	Tube furnace set to 1000
11/13/2012	12:20:38 PM	Helium valve closed
11/13/2012	12:20:38 PM	BCl3 valve closed
11/13/2012	12:20:38 PM	PH3 valve closed
11/13/2012	12:20:38 PM	SiCl4 pre valve closed
11/13/2012	12:20:38 PM	SiCl4 post valve closed
11/13/2012	12:20:38 PM	Main Vac valve closed
11/13/2012	12:20:38 PM	Bypass valve closed
11/13/2012	12:20:38 PM	H2 valve opened
11/13/2012	12:20:38 PM	Bubbler valve opened
11/13/2012	12:20:38 PM	Helium MFC set to  0.000000
11/13/2012	12:20:38 PM	H2 MFC set to  500.000000
11/13/2012	12:20:38 PM	BCl3 MFC set to  0.000000
11/13/2012	12:20:38 PM	PH3 MFC set to  0.000000
11/13/2012	12:20:38 PM	SiCl4 MFC set to  0.000000
11/13/2012	12:20:38 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	12:20:38 PM	Tube furnace set to 950
11/13/2012	12:23:38 PM	Helium valve closed
11/13/2012	12:23:38 PM	BCl3 valve closed
11/13/2012	12:23:38 PM	PH3 valve closed
11/13/2012	12:23:38 PM	SiCl4 pre valve closed
11/13/2012	12:23:38 PM	SiCl4 post valve closed
11/13/2012	12:23:38 PM	Main Vac valve closed
11/13/2012	12:23:38 PM	Bypass valve closed
11/13/2012	12:23:38 PM	H2 valve opened
11/13/2012	12:23:38 PM	Bubbler valve opened
11/13/2012	12:23:38 PM	Helium MFC set to  0.000000
11/13/2012	12:23:38 PM	H2 MFC set to  500.000000
11/13/2012	12:23:38 PM	BCl3 MFC set to  0.000000
11/13/2012	12:23:38 PM	PH3 MFC set to  0.000000
11/13/2012	12:23:38 PM	SiCl4 MFC set to  0.000000
11/13/2012	12:23:38 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	12:23:38 PM	Tube furnace set to 900
11/13/2012	12:26:39 PM	Helium valve closed
11/13/2012	12:26:39 PM	BCl3 valve closed
11/13/2012	12:26:39 PM	PH3 valve closed
11/13/2012	12:26:39 PM	SiCl4 pre valve closed
11/13/2012	12:26:39 PM	SiCl4 post valve closed
11/13/2012	12:26:39 PM	Main Vac valve closed
11/13/2012	12:26:39 PM	Bypass valve closed
11/13/2012	12:26:39 PM	H2 valve opened
11/13/2012	12:26:39 PM	Bubbler valve opened
11/13/2012	12:26:39 PM	Helium MFC set to  0.000000
11/13/2012	12:26:39 PM	H2 MFC set to  500.000000
11/13/2012	12:26:39 PM	BCl3 MFC set to  0.000000
11/13/2012	12:26:39 PM	PH3 MFC set to  0.000000
11/13/2012	12:26:39 PM	SiCl4 MFC set to  0.000000
11/13/2012	12:26:39 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	12:26:39 PM	Tube furnace set to 850
11/13/2012	12:29:39 PM	Helium valve closed
11/13/2012	12:29:39 PM	BCl3 valve closed
11/13/2012	12:29:39 PM	PH3 valve closed
11/13/2012	12:29:39 PM	SiCl4 pre valve closed
11/13/2012	12:29:39 PM	SiCl4 post valve closed
11/13/2012	12:29:39 PM	Main Vac valve closed
11/13/2012	12:29:39 PM	Bypass valve closed
11/13/2012	12:29:39 PM	H2 valve opened
11/13/2012	12:29:39 PM	Bubbler valve opened
11/13/2012	12:29:39 PM	Helium MFC set to  0.000000
11/13/2012	12:29:39 PM	H2 MFC set to  500.000000
11/13/2012	12:29:39 PM	BCl3 MFC set to  0.000000
11/13/2012	12:29:39 PM	PH3 MFC set to  0.000000
11/13/2012	12:29:39 PM	SiCl4 MFC set to  0.000000
11/13/2012	12:29:39 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	12:29:39 PM	Tube furnace set to 800
11/13/2012	12:32:39 PM	Helium valve closed
11/13/2012	12:32:39 PM	BCl3 valve closed
11/13/2012	12:32:39 PM	PH3 valve closed
11/13/2012	12:32:39 PM	SiCl4 pre valve closed
11/13/2012	12:32:39 PM	SiCl4 post valve closed
11/13/2012	12:32:39 PM	Main Vac valve closed
11/13/2012	12:32:39 PM	Bypass valve closed
11/13/2012	12:32:39 PM	H2 valve opened
11/13/2012	12:32:39 PM	Bubbler valve opened
11/13/2012	12:32:39 PM	Helium MFC set to  0.000000
11/13/2012	12:32:39 PM	H2 MFC set to  500.000000
11/13/2012	12:32:39 PM	BCl3 MFC set to  0.000000
11/13/2012	12:32:39 PM	PH3 MFC set to  0.000000
11/13/2012	12:32:39 PM	SiCl4 MFC set to  0.000000
11/13/2012	12:32:39 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	12:32:39 PM	Tube furnace set to 750
11/13/2012	12:35:39 PM	H2 valve closed
11/13/2012	12:35:39 PM	BCl3 valve closed
11/13/2012	12:35:39 PM	PH3 valve closed
11/13/2012	12:35:39 PM	SiCl4 pre valve closed
11/13/2012	12:35:39 PM	SiCl4 post valve closed
11/13/2012	12:35:39 PM	Main Vac valve closed
11/13/2012	12:35:39 PM	Bypass valve closed
11/13/2012	12:35:39 PM	Helium valve opened
11/13/2012	12:35:39 PM	Bubbler valve opened
11/13/2012	12:35:39 PM	Helium MFC set to  400.000000
11/13/2012	12:35:39 PM	H2 MFC set to  0.000000
11/13/2012	12:35:39 PM	BCl3 MFC set to  0.000000
11/13/2012	12:35:39 PM	PH3 MFC set to  0.000000
11/13/2012	12:35:39 PM	SiCl4 MFC set to  0.000000
11/13/2012	12:35:39 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	12:35:39 PM	Tube furnace set to 0
11/13/2012	1:00:39 PM	Helium valve closed
11/13/2012	1:00:39 PM	H2 valve closed
11/13/2012	1:00:39 PM	BCl3 valve closed
11/13/2012	1:00:39 PM	PH3 valve closed
11/13/2012	1:00:39 PM	SiCl4 pre valve closed
11/13/2012	1:00:40 PM	SiCl4 post valve closed
11/13/2012	1:00:40 PM	Main Vac valve closed
11/13/2012	1:00:40 PM	Bypass valve closed
11/13/2012	1:00:40 PM	Bubbler valve closed
11/13/2012	1:00:40 PM	Helium MFC set to  0.000000
11/13/2012	1:00:40 PM	H2 MFC set to  0.000000
11/13/2012	1:00:40 PM	BCl3 MFC set to  0.000000
11/13/2012	1:00:40 PM	PH3 MFC set to  0.000000
11/13/2012	1:00:40 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:00:40 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:00:40 PM	Tube furnace set to 50
11/13/2012	1:05:40 PM	Helium valve closed
11/13/2012	1:05:40 PM	H2 valve closed
11/13/2012	1:05:40 PM	BCl3 valve closed
11/13/2012	1:05:40 PM	PH3 valve closed
11/13/2012	1:05:40 PM	SiCl4 pre valve closed
11/13/2012	1:05:40 PM	SiCl4 post valve closed
11/13/2012	1:05:40 PM	Main Vac valve closed
11/13/2012	1:05:40 PM	Bubbler valve closed
11/13/2012	1:05:40 PM	Bypass valve opened
11/13/2012	1:05:40 PM	Helium MFC set to  0.000000
11/13/2012	1:05:40 PM	H2 MFC set to  0.000000
11/13/2012	1:05:40 PM	BCl3 MFC set to  0.000000
11/13/2012	1:05:40 PM	PH3 MFC set to  0.000000
11/13/2012	1:05:40 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:05:40 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:05:40 PM	Tube furnace set to 0
11/13/2012	1:06:33 PM	Helium valve closed
11/13/2012	1:06:33 PM	H2 valve closed
11/13/2012	1:06:33 PM	BCl3 valve closed
11/13/2012	1:06:33 PM	PH3 valve closed
11/13/2012	1:06:33 PM	SiCl4 pre valve closed
11/13/2012	1:06:33 PM	SiCl4 post valve closed
11/13/2012	1:06:33 PM	Bypass valve closed
11/13/2012	1:06:33 PM	Bubbler valve closed
11/13/2012	1:06:33 PM	Main Vac valve opened
11/13/2012	1:06:33 PM	Helium MFC set to  0.000000
11/13/2012	1:06:33 PM	H2 MFC set to  0.000000
11/13/2012	1:06:33 PM	BCl3 MFC set to  0.000000
11/13/2012	1:06:33 PM	PH3 MFC set to  0.000000
11/13/2012	1:06:33 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:06:33 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:06:33 PM	Tube furnace set to 0
11/13/2012	1:06:34 PM	Run finished at 1:06 PM
11/13/2012	1:09:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2012	1:09:02 PM	Recipe started at 1:09 PM
11/13/2012	1:09:02 PM	Helium valve closed
11/13/2012	1:09:02 PM	H2 valve closed
11/13/2012	1:09:02 PM	BCl3 valve closed
11/13/2012	1:09:02 PM	PH3 valve closed
11/13/2012	1:09:02 PM	SiCl4 pre valve closed
11/13/2012	1:09:02 PM	SiCl4 post valve closed
11/13/2012	1:09:02 PM	Main Vac valve closed
11/13/2012	1:09:02 PM	Bypass valve closed
11/13/2012	1:09:02 PM	Bubbler valve closed
11/13/2012	1:09:02 PM	Helium MFC set to  0.000000
11/13/2012	1:09:02 PM	H2 MFC set to  0.000000
11/13/2012	1:09:02 PM	BCl3 MFC set to  0.000000
11/13/2012	1:09:02 PM	PH3 MFC set to  0.000000
11/13/2012	1:09:02 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:09:02 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:09:02 PM	Tube furnace set to 0
11/13/2012	1:09:05 PM	H2 valve closed
11/13/2012	1:09:05 PM	BCl3 valve closed
11/13/2012	1:09:05 PM	PH3 valve closed
11/13/2012	1:09:05 PM	SiCl4 pre valve closed
11/13/2012	1:09:05 PM	SiCl4 post valve closed
11/13/2012	1:09:05 PM	Main Vac valve closed
11/13/2012	1:09:05 PM	Bypass valve closed
11/13/2012	1:09:05 PM	Bubbler valve closed
11/13/2012	1:09:05 PM	Helium valve opened
11/13/2012	1:09:05 PM	Helium MFC set to  500.000000
11/13/2012	1:09:05 PM	H2 MFC set to  0.000000
11/13/2012	1:09:05 PM	BCl3 MFC set to  0.000000
11/13/2012	1:09:05 PM	PH3 MFC set to  0.000000
11/13/2012	1:09:05 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:09:05 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:09:05 PM	Tube furnace set to 0
11/13/2012	1:10:14 PM	Helium valve closed
11/13/2012	1:10:14 PM	H2 valve closed
11/13/2012	1:10:14 PM	BCl3 valve closed
11/13/2012	1:10:14 PM	PH3 valve closed
11/13/2012	1:10:14 PM	SiCl4 pre valve closed
11/13/2012	1:10:14 PM	SiCl4 post valve closed
11/13/2012	1:10:14 PM	Main Vac valve closed
11/13/2012	1:10:14 PM	Bypass valve closed
11/13/2012	1:10:14 PM	Bubbler valve closed
11/13/2012	1:10:14 PM	Helium MFC set to  0.000000
11/13/2012	1:10:14 PM	H2 MFC set to  0.000000
11/13/2012	1:10:14 PM	BCl3 MFC set to  0.000000
11/13/2012	1:10:14 PM	PH3 MFC set to  0.000000
11/13/2012	1:10:14 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:10:14 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:10:14 PM	Tube furnace set to 0
11/13/2012	1:10:15 PM	Run finished at 1:10 PM
11/13/2012	1:10:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2012	1:12:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	1:12:17 PM	Recipe started at 1:12 PM
11/13/2012	1:12:17 PM	Helium valve closed
11/13/2012	1:12:17 PM	H2 valve closed
11/13/2012	1:12:17 PM	BCl3 valve closed
11/13/2012	1:12:17 PM	PH3 valve closed
11/13/2012	1:12:17 PM	SiCl4 pre valve closed
11/13/2012	1:12:17 PM	SiCl4 post valve closed
11/13/2012	1:12:17 PM	Main Vac valve closed
11/13/2012	1:12:17 PM	Bubbler valve closed
11/13/2012	1:12:17 PM	Bypass valve opened
11/13/2012	1:12:17 PM	Helium MFC set to  0.000000
11/13/2012	1:12:17 PM	H2 MFC set to  0.000000
11/13/2012	1:12:17 PM	BCl3 MFC set to  0.000000
11/13/2012	1:12:17 PM	PH3 MFC set to  0.000000
11/13/2012	1:12:17 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:12:17 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:12:17 PM	Tube furnace set to 0
11/13/2012	1:13:23 PM	Helium valve closed
11/13/2012	1:13:23 PM	H2 valve closed
11/13/2012	1:13:23 PM	BCl3 valve closed
11/13/2012	1:13:23 PM	PH3 valve closed
11/13/2012	1:13:23 PM	SiCl4 pre valve closed
11/13/2012	1:13:23 PM	SiCl4 post valve closed
11/13/2012	1:13:23 PM	Main Vac valve closed
11/13/2012	1:13:23 PM	Bubbler valve closed
11/13/2012	1:13:23 PM	Bypass valve opened
11/13/2012	1:13:23 PM	Helium MFC set to  0.000000
11/13/2012	1:13:23 PM	H2 MFC set to  0.000000
11/13/2012	1:13:23 PM	BCl3 MFC set to  0.000000
11/13/2012	1:13:23 PM	PH3 MFC set to  0.000000
11/13/2012	1:13:23 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:13:23 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:13:23 PM	Tube furnace set to 0
11/13/2012	1:14:23 PM	Helium valve closed
11/13/2012	1:14:23 PM	H2 valve closed
11/13/2012	1:14:23 PM	BCl3 valve closed
11/13/2012	1:14:23 PM	PH3 valve closed
11/13/2012	1:14:23 PM	SiCl4 pre valve closed
11/13/2012	1:14:23 PM	SiCl4 post valve closed
11/13/2012	1:14:23 PM	Bypass valve closed
11/13/2012	1:14:23 PM	Bubbler valve closed
11/13/2012	1:14:23 PM	Main Vac valve opened
11/13/2012	1:14:23 PM	Helium MFC set to  0.000000
11/13/2012	1:14:23 PM	H2 MFC set to  0.000000
11/13/2012	1:14:23 PM	BCl3 MFC set to  0.000000
11/13/2012	1:14:23 PM	PH3 MFC set to  0.000000
11/13/2012	1:14:23 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:14:23 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:14:23 PM	Tube furnace set to 0
11/13/2012	1:14:24 PM	Run finished at 1:14 PM
11/13/2012	1:14:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	1:18:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2012	1:18:54 PM	Recipe started at 1:18 PM
11/13/2012	1:18:54 PM	Helium valve closed
11/13/2012	1:18:54 PM	H2 valve closed
11/13/2012	1:18:54 PM	BCl3 valve closed
11/13/2012	1:18:54 PM	PH3 valve closed
11/13/2012	1:18:54 PM	SiCl4 pre valve closed
11/13/2012	1:18:54 PM	SiCl4 post valve closed
11/13/2012	1:18:54 PM	Main Vac valve closed
11/13/2012	1:18:54 PM	Bypass valve closed
11/13/2012	1:18:54 PM	Bubbler valve closed
11/13/2012	1:18:54 PM	Helium MFC set to  0.000000
11/13/2012	1:18:54 PM	H2 MFC set to  0.000000
11/13/2012	1:18:54 PM	BCl3 MFC set to  0.000000
11/13/2012	1:18:54 PM	PH3 MFC set to  0.000000
11/13/2012	1:18:54 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:18:54 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:18:55 PM	Tube furnace set to 0
11/13/2012	1:18:58 PM	H2 valve closed
11/13/2012	1:18:58 PM	BCl3 valve closed
11/13/2012	1:18:58 PM	PH3 valve closed
11/13/2012	1:18:58 PM	SiCl4 pre valve closed
11/13/2012	1:18:58 PM	SiCl4 post valve closed
11/13/2012	1:18:58 PM	Main Vac valve closed
11/13/2012	1:18:58 PM	Bypass valve closed
11/13/2012	1:18:58 PM	Bubbler valve closed
11/13/2012	1:18:58 PM	Helium valve opened
11/13/2012	1:18:58 PM	Helium MFC set to  500.000000
11/13/2012	1:18:58 PM	H2 MFC set to  0.000000
11/13/2012	1:18:58 PM	BCl3 MFC set to  0.000000
11/13/2012	1:18:58 PM	PH3 MFC set to  0.000000
11/13/2012	1:18:58 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:18:58 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:18:58 PM	Tube furnace set to 0
11/13/2012	1:20:09 PM	Helium valve closed
11/13/2012	1:20:09 PM	H2 valve closed
11/13/2012	1:20:09 PM	BCl3 valve closed
11/13/2012	1:20:09 PM	PH3 valve closed
11/13/2012	1:20:09 PM	SiCl4 pre valve closed
11/13/2012	1:20:09 PM	SiCl4 post valve closed
11/13/2012	1:20:09 PM	Main Vac valve closed
11/13/2012	1:20:09 PM	Bypass valve closed
11/13/2012	1:20:09 PM	Bubbler valve closed
11/13/2012	1:20:09 PM	Helium MFC set to  0.000000
11/13/2012	1:20:09 PM	H2 MFC set to  0.000000
11/13/2012	1:20:09 PM	BCl3 MFC set to  0.000000
11/13/2012	1:20:09 PM	PH3 MFC set to  0.000000
11/13/2012	1:20:09 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:20:10 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:20:10 PM	Tube furnace set to 0
11/13/2012	1:20:11 PM	Run finished at 1:20 PM
11/13/2012	1:20:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2012	1:24:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	1:24:38 PM	Recipe started at 1:24 PM
11/13/2012	1:24:38 PM	Helium valve closed
11/13/2012	1:24:38 PM	H2 valve closed
11/13/2012	1:24:38 PM	BCl3 valve closed
11/13/2012	1:24:38 PM	PH3 valve closed
11/13/2012	1:24:38 PM	SiCl4 pre valve closed
11/13/2012	1:24:38 PM	SiCl4 post valve closed
11/13/2012	1:24:38 PM	Main Vac valve closed
11/13/2012	1:24:38 PM	Bubbler valve closed
11/13/2012	1:24:38 PM	Bypass valve opened
11/13/2012	1:24:38 PM	Helium MFC set to  0.000000
11/13/2012	1:24:38 PM	H2 MFC set to  0.000000
11/13/2012	1:24:38 PM	BCl3 MFC set to  0.000000
11/13/2012	1:24:38 PM	PH3 MFC set to  0.000000
11/13/2012	1:24:38 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:24:38 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:24:38 PM	Tube furnace set to 0
11/13/2012	1:25:49 PM	Helium valve closed
11/13/2012	1:25:49 PM	H2 valve closed
11/13/2012	1:25:49 PM	BCl3 valve closed
11/13/2012	1:25:49 PM	PH3 valve closed
11/13/2012	1:25:49 PM	SiCl4 pre valve closed
11/13/2012	1:25:49 PM	SiCl4 post valve closed
11/13/2012	1:25:49 PM	Main Vac valve closed
11/13/2012	1:25:49 PM	Bubbler valve closed
11/13/2012	1:25:49 PM	Bypass valve opened
11/13/2012	1:25:49 PM	Helium MFC set to  0.000000
11/13/2012	1:25:49 PM	H2 MFC set to  0.000000
11/13/2012	1:25:49 PM	BCl3 MFC set to  0.000000
11/13/2012	1:25:49 PM	PH3 MFC set to  0.000000
11/13/2012	1:25:49 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:25:49 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:25:49 PM	Tube furnace set to 0
11/13/2012	1:26:49 PM	Helium valve closed
11/13/2012	1:26:49 PM	H2 valve closed
11/13/2012	1:26:49 PM	BCl3 valve closed
11/13/2012	1:26:49 PM	PH3 valve closed
11/13/2012	1:26:49 PM	SiCl4 pre valve closed
11/13/2012	1:26:49 PM	SiCl4 post valve closed
11/13/2012	1:26:49 PM	Bypass valve closed
11/13/2012	1:26:49 PM	Bubbler valve closed
11/13/2012	1:26:49 PM	Main Vac valve opened
11/13/2012	1:26:49 PM	Helium MFC set to  0.000000
11/13/2012	1:26:49 PM	H2 MFC set to  0.000000
11/13/2012	1:26:49 PM	BCl3 MFC set to  0.000000
11/13/2012	1:26:49 PM	PH3 MFC set to  0.000000
11/13/2012	1:26:49 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:26:49 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:26:49 PM	Tube furnace set to 0
11/13/2012	1:26:50 PM	Run finished at 1:26 PM
11/13/2012	1:26:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	1:28:43 PM	Recipe started at 1:28 PM
11/13/2012	1:28:43 PM	Helium valve closed
11/13/2012	1:28:43 PM	H2 valve closed
11/13/2012	1:28:43 PM	BCl3 valve closed
11/13/2012	1:28:43 PM	PH3 valve closed
11/13/2012	1:28:43 PM	SiCl4 pre valve closed
11/13/2012	1:28:43 PM	SiCl4 post valve closed
11/13/2012	1:28:43 PM	Bypass valve closed
11/13/2012	1:28:43 PM	Bubbler valve closed
11/13/2012	1:28:43 PM	Main Vac valve opened
11/13/2012	1:28:43 PM	Helium MFC set to  0.000000
11/13/2012	1:28:43 PM	H2 MFC set to  0.000000
11/13/2012	1:28:43 PM	BCl3 MFC set to  0.000000
11/13/2012	1:28:43 PM	PH3 MFC set to  0.000000
11/13/2012	1:28:43 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:28:43 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:28:43 PM	Tube furnace set to 0
11/13/2012	1:29:13 PM	H2 valve closed
11/13/2012	1:29:13 PM	BCl3 valve closed
11/13/2012	1:29:13 PM	PH3 valve closed
11/13/2012	1:29:13 PM	SiCl4 pre valve closed
11/13/2012	1:29:13 PM	SiCl4 post valve closed
11/13/2012	1:29:13 PM	Bypass valve closed
11/13/2012	1:29:13 PM	Bubbler valve closed
11/13/2012	1:29:13 PM	Helium valve opened
11/13/2012	1:29:13 PM	Main Vac valve opened
11/13/2012	1:29:13 PM	Helium MFC set to  20.000000
11/13/2012	1:29:13 PM	H2 MFC set to  0.000000
11/13/2012	1:29:13 PM	BCl3 MFC set to  0.000000
11/13/2012	1:29:13 PM	PH3 MFC set to  0.000000
11/13/2012	1:29:13 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:29:13 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:29:13 PM	Tube furnace set to 0
11/13/2012	1:29:43 PM	Helium valve closed
11/13/2012	1:29:43 PM	H2 valve closed
11/13/2012	1:29:43 PM	BCl3 valve closed
11/13/2012	1:29:43 PM	PH3 valve closed
11/13/2012	1:29:43 PM	SiCl4 pre valve closed
11/13/2012	1:29:43 PM	SiCl4 post valve closed
11/13/2012	1:29:43 PM	Bypass valve closed
11/13/2012	1:29:43 PM	Bubbler valve closed
11/13/2012	1:29:43 PM	Main Vac valve opened
11/13/2012	1:29:43 PM	Helium MFC set to  0.000000
11/13/2012	1:29:44 PM	H2 MFC set to  0.000000
11/13/2012	1:29:44 PM	BCl3 MFC set to  0.000000
11/13/2012	1:29:44 PM	PH3 MFC set to  0.000000
11/13/2012	1:29:44 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:29:44 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:29:44 PM	Tube furnace set to 0
11/13/2012	1:30:14 PM	H2 valve closed
11/13/2012	1:30:14 PM	BCl3 valve closed
11/13/2012	1:30:14 PM	PH3 valve closed
11/13/2012	1:30:14 PM	SiCl4 pre valve closed
11/13/2012	1:30:14 PM	SiCl4 post valve closed
11/13/2012	1:30:14 PM	Bypass valve closed
11/13/2012	1:30:14 PM	Bubbler valve closed
11/13/2012	1:30:14 PM	Helium valve opened
11/13/2012	1:30:14 PM	Main Vac valve opened
11/13/2012	1:30:14 PM	Helium MFC set to  20.000000
11/13/2012	1:30:14 PM	H2 MFC set to  0.000000
11/13/2012	1:30:14 PM	BCl3 MFC set to  0.000000
11/13/2012	1:30:14 PM	PH3 MFC set to  0.000000
11/13/2012	1:30:14 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:30:14 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:30:14 PM	Tube furnace set to 0
11/13/2012	1:30:44 PM	Helium valve closed
11/13/2012	1:30:44 PM	H2 valve closed
11/13/2012	1:30:44 PM	BCl3 valve closed
11/13/2012	1:30:44 PM	PH3 valve closed
11/13/2012	1:30:44 PM	SiCl4 pre valve closed
11/13/2012	1:30:44 PM	SiCl4 post valve closed
11/13/2012	1:30:44 PM	Bypass valve closed
11/13/2012	1:30:44 PM	Bubbler valve closed
11/13/2012	1:30:44 PM	Main Vac valve opened
11/13/2012	1:30:44 PM	Helium MFC set to  0.000000
11/13/2012	1:30:44 PM	H2 MFC set to  0.000000
11/13/2012	1:30:44 PM	BCl3 MFC set to  0.000000
11/13/2012	1:30:44 PM	PH3 MFC set to  0.000000
11/13/2012	1:30:44 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:30:44 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:30:44 PM	Tube furnace set to 0
11/13/2012	1:31:14 PM	H2 valve closed
11/13/2012	1:31:14 PM	BCl3 valve closed
11/13/2012	1:31:14 PM	PH3 valve closed
11/13/2012	1:31:14 PM	SiCl4 pre valve closed
11/13/2012	1:31:14 PM	SiCl4 post valve closed
11/13/2012	1:31:14 PM	Bypass valve closed
11/13/2012	1:31:14 PM	Bubbler valve closed
11/13/2012	1:31:14 PM	Helium valve opened
11/13/2012	1:31:14 PM	Main Vac valve opened
11/13/2012	1:31:14 PM	Helium MFC set to  20.000000
11/13/2012	1:31:14 PM	H2 MFC set to  0.000000
11/13/2012	1:31:14 PM	BCl3 MFC set to  0.000000
11/13/2012	1:31:14 PM	PH3 MFC set to  0.000000
11/13/2012	1:31:14 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:31:14 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:31:14 PM	Tube furnace set to 0
11/13/2012	1:31:44 PM	Helium valve closed
11/13/2012	1:31:44 PM	H2 valve closed
11/13/2012	1:31:44 PM	BCl3 valve closed
11/13/2012	1:31:44 PM	PH3 valve closed
11/13/2012	1:31:44 PM	SiCl4 pre valve closed
11/13/2012	1:31:44 PM	SiCl4 post valve closed
11/13/2012	1:31:44 PM	Bypass valve closed
11/13/2012	1:31:45 PM	Bubbler valve closed
11/13/2012	1:31:45 PM	Main Vac valve opened
11/13/2012	1:31:45 PM	Helium MFC set to  0.000000
11/13/2012	1:31:45 PM	H2 MFC set to  0.000000
11/13/2012	1:31:45 PM	BCl3 MFC set to  0.000000
11/13/2012	1:31:45 PM	PH3 MFC set to  0.000000
11/13/2012	1:31:45 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:31:45 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:31:45 PM	Tube furnace set to 0
11/13/2012	1:32:15 PM	H2 valve closed
11/13/2012	1:32:15 PM	BCl3 valve closed
11/13/2012	1:32:15 PM	PH3 valve closed
11/13/2012	1:32:15 PM	SiCl4 pre valve closed
11/13/2012	1:32:15 PM	SiCl4 post valve closed
11/13/2012	1:32:15 PM	Bypass valve closed
11/13/2012	1:32:15 PM	Bubbler valve closed
11/13/2012	1:32:15 PM	Helium valve opened
11/13/2012	1:32:15 PM	Main Vac valve opened
11/13/2012	1:32:15 PM	Helium MFC set to  20.000000
11/13/2012	1:32:15 PM	H2 MFC set to  0.000000
11/13/2012	1:32:15 PM	BCl3 MFC set to  0.000000
11/13/2012	1:32:15 PM	PH3 MFC set to  0.000000
11/13/2012	1:32:15 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:32:15 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:32:15 PM	Tube furnace set to 0
11/13/2012	1:32:45 PM	Helium valve closed
11/13/2012	1:32:45 PM	H2 valve closed
11/13/2012	1:32:45 PM	BCl3 valve closed
11/13/2012	1:32:45 PM	PH3 valve closed
11/13/2012	1:32:45 PM	SiCl4 pre valve closed
11/13/2012	1:32:45 PM	SiCl4 post valve closed
11/13/2012	1:32:45 PM	Bypass valve closed
11/13/2012	1:32:45 PM	Bubbler valve closed
11/13/2012	1:32:45 PM	Main Vac valve opened
11/13/2012	1:32:45 PM	Helium MFC set to  0.000000
11/13/2012	1:32:45 PM	H2 MFC set to  0.000000
11/13/2012	1:32:45 PM	BCl3 MFC set to  0.000000
11/13/2012	1:32:45 PM	PH3 MFC set to  0.000000
11/13/2012	1:32:45 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:32:45 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:32:45 PM	Tube furnace set to 0
11/13/2012	1:33:15 PM	H2 valve closed
11/13/2012	1:33:15 PM	BCl3 valve closed
11/13/2012	1:33:15 PM	PH3 valve closed
11/13/2012	1:33:15 PM	SiCl4 pre valve closed
11/13/2012	1:33:15 PM	SiCl4 post valve closed
11/13/2012	1:33:15 PM	Bypass valve closed
11/13/2012	1:33:15 PM	Bubbler valve closed
11/13/2012	1:33:15 PM	Helium valve opened
11/13/2012	1:33:15 PM	Main Vac valve opened
11/13/2012	1:33:15 PM	Helium MFC set to  20.000000
11/13/2012	1:33:15 PM	H2 MFC set to  0.000000
11/13/2012	1:33:15 PM	BCl3 MFC set to  0.000000
11/13/2012	1:33:15 PM	PH3 MFC set to  0.000000
11/13/2012	1:33:15 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:33:15 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:33:15 PM	Tube furnace set to 0
11/13/2012	1:33:45 PM	Helium valve closed
11/13/2012	1:33:45 PM	H2 valve closed
11/13/2012	1:33:45 PM	BCl3 valve closed
11/13/2012	1:33:45 PM	PH3 valve closed
11/13/2012	1:33:46 PM	SiCl4 pre valve closed
11/13/2012	1:33:46 PM	SiCl4 post valve closed
11/13/2012	1:33:46 PM	Bypass valve closed
11/13/2012	1:33:46 PM	Bubbler valve closed
11/13/2012	1:33:46 PM	Main Vac valve opened
11/13/2012	1:33:46 PM	Helium MFC set to  0.000000
11/13/2012	1:33:46 PM	H2 MFC set to  0.000000
11/13/2012	1:33:46 PM	BCl3 MFC set to  0.000000
11/13/2012	1:33:46 PM	PH3 MFC set to  0.000000
11/13/2012	1:33:46 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:33:46 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:33:46 PM	Tube furnace set to 0
11/13/2012	1:34:16 PM	H2 valve closed
11/13/2012	1:34:16 PM	BCl3 valve closed
11/13/2012	1:34:16 PM	PH3 valve closed
11/13/2012	1:34:16 PM	SiCl4 pre valve closed
11/13/2012	1:34:16 PM	SiCl4 post valve closed
11/13/2012	1:34:16 PM	Bypass valve closed
11/13/2012	1:34:16 PM	Bubbler valve closed
11/13/2012	1:34:16 PM	Helium valve opened
11/13/2012	1:34:16 PM	Main Vac valve opened
11/13/2012	1:34:16 PM	Helium MFC set to  20.000000
11/13/2012	1:34:16 PM	H2 MFC set to  0.000000
11/13/2012	1:34:16 PM	BCl3 MFC set to  0.000000
11/13/2012	1:34:16 PM	PH3 MFC set to  0.000000
11/13/2012	1:34:16 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:34:16 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:34:16 PM	Tube furnace set to 0
11/13/2012	1:34:46 PM	Helium valve closed
11/13/2012	1:34:46 PM	H2 valve closed
11/13/2012	1:34:46 PM	BCl3 valve closed
11/13/2012	1:34:46 PM	PH3 valve closed
11/13/2012	1:34:46 PM	SiCl4 pre valve closed
11/13/2012	1:34:46 PM	SiCl4 post valve closed
11/13/2012	1:34:46 PM	Bypass valve closed
11/13/2012	1:34:46 PM	Bubbler valve closed
11/13/2012	1:34:46 PM	Main Vac valve opened
11/13/2012	1:34:46 PM	Helium MFC set to  0.000000
11/13/2012	1:34:46 PM	H2 MFC set to  0.000000
11/13/2012	1:34:46 PM	BCl3 MFC set to  0.000000
11/13/2012	1:34:46 PM	PH3 MFC set to  0.000000
11/13/2012	1:34:46 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:34:46 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:34:46 PM	Tube furnace set to 0
11/13/2012	1:35:16 PM	H2 valve closed
11/13/2012	1:35:16 PM	BCl3 valve closed
11/13/2012	1:35:16 PM	PH3 valve closed
11/13/2012	1:35:16 PM	SiCl4 pre valve closed
11/13/2012	1:35:16 PM	SiCl4 post valve closed
11/13/2012	1:35:16 PM	Bypass valve closed
11/13/2012	1:35:16 PM	Bubbler valve closed
11/13/2012	1:35:16 PM	Helium valve opened
11/13/2012	1:35:16 PM	Main Vac valve opened
11/13/2012	1:35:16 PM	Helium MFC set to  20.000000
11/13/2012	1:35:16 PM	H2 MFC set to  0.000000
11/13/2012	1:35:16 PM	BCl3 MFC set to  0.000000
11/13/2012	1:35:16 PM	PH3 MFC set to  0.000000
11/13/2012	1:35:16 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:35:16 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:35:16 PM	Tube furnace set to 0
11/13/2012	1:35:46 PM	Helium valve closed
11/13/2012	1:35:46 PM	H2 valve closed
11/13/2012	1:35:47 PM	BCl3 valve closed
11/13/2012	1:35:47 PM	PH3 valve closed
11/13/2012	1:35:47 PM	SiCl4 pre valve closed
11/13/2012	1:35:47 PM	SiCl4 post valve closed
11/13/2012	1:35:47 PM	Bypass valve closed
11/13/2012	1:35:47 PM	Bubbler valve closed
11/13/2012	1:35:47 PM	Main Vac valve opened
11/13/2012	1:35:47 PM	Helium MFC set to  0.000000
11/13/2012	1:35:47 PM	H2 MFC set to  0.000000
11/13/2012	1:35:47 PM	BCl3 MFC set to  0.000000
11/13/2012	1:35:47 PM	PH3 MFC set to  0.000000
11/13/2012	1:35:47 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:35:47 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:35:47 PM	Tube furnace set to 0
11/13/2012	1:36:17 PM	H2 valve closed
11/13/2012	1:36:17 PM	BCl3 valve closed
11/13/2012	1:36:17 PM	PH3 valve closed
11/13/2012	1:36:17 PM	SiCl4 pre valve closed
11/13/2012	1:36:17 PM	SiCl4 post valve closed
11/13/2012	1:36:17 PM	Bypass valve closed
11/13/2012	1:36:17 PM	Bubbler valve closed
11/13/2012	1:36:17 PM	Helium valve opened
11/13/2012	1:36:17 PM	Main Vac valve opened
11/13/2012	1:36:17 PM	Helium MFC set to  20.000000
11/13/2012	1:36:17 PM	H2 MFC set to  0.000000
11/13/2012	1:36:17 PM	BCl3 MFC set to  0.000000
11/13/2012	1:36:17 PM	PH3 MFC set to  0.000000
11/13/2012	1:36:17 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:36:17 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:36:17 PM	Tube furnace set to 0
11/13/2012	1:36:47 PM	Helium valve closed
11/13/2012	1:36:47 PM	H2 valve closed
11/13/2012	1:36:47 PM	BCl3 valve closed
11/13/2012	1:36:47 PM	PH3 valve closed
11/13/2012	1:36:47 PM	SiCl4 pre valve closed
11/13/2012	1:36:47 PM	SiCl4 post valve closed
11/13/2012	1:36:47 PM	Bypass valve closed
11/13/2012	1:36:47 PM	Bubbler valve closed
11/13/2012	1:36:47 PM	Main Vac valve opened
11/13/2012	1:36:47 PM	Helium MFC set to  0.000000
11/13/2012	1:36:47 PM	H2 MFC set to  0.000000
11/13/2012	1:36:47 PM	BCl3 MFC set to  0.000000
11/13/2012	1:36:47 PM	PH3 MFC set to  0.000000
11/13/2012	1:36:47 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:36:47 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:36:47 PM	Tube furnace set to 0
11/13/2012	1:37:17 PM	H2 valve closed
11/13/2012	1:37:17 PM	BCl3 valve closed
11/13/2012	1:37:17 PM	PH3 valve closed
11/13/2012	1:37:17 PM	SiCl4 pre valve closed
11/13/2012	1:37:17 PM	SiCl4 post valve closed
11/13/2012	1:37:17 PM	Bypass valve closed
11/13/2012	1:37:17 PM	Bubbler valve closed
11/13/2012	1:37:17 PM	Helium valve opened
11/13/2012	1:37:17 PM	Main Vac valve opened
11/13/2012	1:37:17 PM	Helium MFC set to  20.000000
11/13/2012	1:37:17 PM	H2 MFC set to  0.000000
11/13/2012	1:37:17 PM	BCl3 MFC set to  0.000000
11/13/2012	1:37:17 PM	PH3 MFC set to  0.000000
11/13/2012	1:37:17 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:37:17 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:37:17 PM	Tube furnace set to 0
11/13/2012	1:37:48 PM	Helium valve closed
11/13/2012	1:37:48 PM	H2 valve closed
11/13/2012	1:37:48 PM	BCl3 valve closed
11/13/2012	1:37:48 PM	PH3 valve closed
11/13/2012	1:37:48 PM	SiCl4 pre valve closed
11/13/2012	1:37:48 PM	SiCl4 post valve closed
11/13/2012	1:37:48 PM	Bypass valve closed
11/13/2012	1:37:48 PM	Bubbler valve closed
11/13/2012	1:37:48 PM	Main Vac valve opened
11/13/2012	1:37:48 PM	Helium MFC set to  0.000000
11/13/2012	1:37:48 PM	H2 MFC set to  0.000000
11/13/2012	1:37:48 PM	BCl3 MFC set to  0.000000
11/13/2012	1:37:48 PM	PH3 MFC set to  0.000000
11/13/2012	1:37:48 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:37:48 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:37:48 PM	Tube furnace set to 200
11/13/2012	1:38:18 PM	H2 valve closed
11/13/2012	1:38:18 PM	BCl3 valve closed
11/13/2012	1:38:18 PM	PH3 valve closed
11/13/2012	1:38:18 PM	SiCl4 pre valve closed
11/13/2012	1:38:18 PM	SiCl4 post valve closed
11/13/2012	1:38:18 PM	Bypass valve closed
11/13/2012	1:38:18 PM	Bubbler valve closed
11/13/2012	1:38:18 PM	Helium valve opened
11/13/2012	1:38:18 PM	Main Vac valve opened
11/13/2012	1:38:18 PM	Helium MFC set to  20.000000
11/13/2012	1:38:18 PM	H2 MFC set to  0.000000
11/13/2012	1:38:18 PM	BCl3 MFC set to  0.000000
11/13/2012	1:38:18 PM	PH3 MFC set to  0.000000
11/13/2012	1:38:18 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:38:18 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:38:18 PM	Tube furnace set to 200
11/13/2012	1:38:48 PM	Helium valve closed
11/13/2012	1:38:48 PM	H2 valve closed
11/13/2012	1:38:48 PM	BCl3 valve closed
11/13/2012	1:38:48 PM	PH3 valve closed
11/13/2012	1:38:48 PM	SiCl4 pre valve closed
11/13/2012	1:38:48 PM	SiCl4 post valve closed
11/13/2012	1:38:48 PM	Bypass valve closed
11/13/2012	1:38:48 PM	Bubbler valve closed
11/13/2012	1:38:48 PM	Main Vac valve opened
11/13/2012	1:38:48 PM	Helium MFC set to  0.000000
11/13/2012	1:38:48 PM	H2 MFC set to  0.000000
11/13/2012	1:38:48 PM	BCl3 MFC set to  0.000000
11/13/2012	1:38:48 PM	PH3 MFC set to  0.000000
11/13/2012	1:38:48 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:38:48 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:38:48 PM	Tube furnace set to 200
11/13/2012	1:39:18 PM	H2 valve closed
11/13/2012	1:39:18 PM	BCl3 valve closed
11/13/2012	1:39:18 PM	PH3 valve closed
11/13/2012	1:39:18 PM	SiCl4 pre valve closed
11/13/2012	1:39:18 PM	SiCl4 post valve closed
11/13/2012	1:39:18 PM	Bypass valve closed
11/13/2012	1:39:18 PM	Bubbler valve closed
11/13/2012	1:39:18 PM	Helium valve opened
11/13/2012	1:39:18 PM	Main Vac valve opened
11/13/2012	1:39:18 PM	Helium MFC set to  20.000000
11/13/2012	1:39:18 PM	H2 MFC set to  0.000000
11/13/2012	1:39:18 PM	BCl3 MFC set to  0.000000
11/13/2012	1:39:18 PM	PH3 MFC set to  0.000000
11/13/2012	1:39:18 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:39:18 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:39:19 PM	Tube furnace set to 200
11/13/2012	1:39:49 PM	Helium valve closed
11/13/2012	1:39:49 PM	H2 valve closed
11/13/2012	1:39:49 PM	BCl3 valve closed
11/13/2012	1:39:49 PM	PH3 valve closed
11/13/2012	1:39:49 PM	SiCl4 pre valve closed
11/13/2012	1:39:49 PM	SiCl4 post valve closed
11/13/2012	1:39:49 PM	Bypass valve closed
11/13/2012	1:39:49 PM	Bubbler valve closed
11/13/2012	1:39:49 PM	Main Vac valve opened
11/13/2012	1:39:49 PM	Helium MFC set to  0.000000
11/13/2012	1:39:49 PM	H2 MFC set to  0.000000
11/13/2012	1:39:49 PM	BCl3 MFC set to  0.000000
11/13/2012	1:39:49 PM	PH3 MFC set to  0.000000
11/13/2012	1:39:49 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:39:49 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:39:49 PM	Tube furnace set to 200
11/13/2012	1:40:19 PM	H2 valve closed
11/13/2012	1:40:19 PM	BCl3 valve closed
11/13/2012	1:40:19 PM	PH3 valve closed
11/13/2012	1:40:19 PM	SiCl4 pre valve closed
11/13/2012	1:40:19 PM	SiCl4 post valve closed
11/13/2012	1:40:19 PM	Bypass valve closed
11/13/2012	1:40:19 PM	Bubbler valve closed
11/13/2012	1:40:19 PM	Helium valve opened
11/13/2012	1:40:19 PM	Main Vac valve opened
11/13/2012	1:40:19 PM	Helium MFC set to  20.000000
11/13/2012	1:40:19 PM	H2 MFC set to  0.000000
11/13/2012	1:40:19 PM	BCl3 MFC set to  0.000000
11/13/2012	1:40:19 PM	PH3 MFC set to  0.000000
11/13/2012	1:40:19 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:40:19 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:40:19 PM	Tube furnace set to 200
11/13/2012	1:40:49 PM	Helium valve closed
11/13/2012	1:40:49 PM	H2 valve closed
11/13/2012	1:40:49 PM	BCl3 valve closed
11/13/2012	1:40:49 PM	PH3 valve closed
11/13/2012	1:40:49 PM	SiCl4 pre valve closed
11/13/2012	1:40:49 PM	SiCl4 post valve closed
11/13/2012	1:40:49 PM	Bypass valve closed
11/13/2012	1:40:49 PM	Bubbler valve closed
11/13/2012	1:40:49 PM	Main Vac valve opened
11/13/2012	1:40:49 PM	Helium MFC set to  0.000000
11/13/2012	1:40:49 PM	H2 MFC set to  0.000000
11/13/2012	1:40:49 PM	BCl3 MFC set to  0.000000
11/13/2012	1:40:49 PM	PH3 MFC set to  0.000000
11/13/2012	1:40:49 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:40:49 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:40:49 PM	Tube furnace set to 200
11/13/2012	1:41:19 PM	H2 valve closed
11/13/2012	1:41:19 PM	BCl3 valve closed
11/13/2012	1:41:19 PM	PH3 valve closed
11/13/2012	1:41:19 PM	SiCl4 pre valve closed
11/13/2012	1:41:19 PM	SiCl4 post valve closed
11/13/2012	1:41:19 PM	Bypass valve closed
11/13/2012	1:41:19 PM	Bubbler valve closed
11/13/2012	1:41:19 PM	Helium valve opened
11/13/2012	1:41:19 PM	Main Vac valve opened
11/13/2012	1:41:19 PM	Helium MFC set to  20.000000
11/13/2012	1:41:19 PM	H2 MFC set to  0.000000
11/13/2012	1:41:19 PM	BCl3 MFC set to  0.000000
11/13/2012	1:41:19 PM	PH3 MFC set to  0.000000
11/13/2012	1:41:19 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:41:19 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:41:19 PM	Tube furnace set to 200
11/13/2012	1:41:50 PM	Helium valve closed
11/13/2012	1:41:50 PM	H2 valve closed
11/13/2012	1:41:50 PM	BCl3 valve closed
11/13/2012	1:41:50 PM	PH3 valve closed
11/13/2012	1:41:50 PM	SiCl4 pre valve closed
11/13/2012	1:41:50 PM	SiCl4 post valve closed
11/13/2012	1:41:50 PM	Bypass valve closed
11/13/2012	1:41:50 PM	Bubbler valve closed
11/13/2012	1:41:50 PM	Main Vac valve opened
11/13/2012	1:41:50 PM	Helium MFC set to  0.000000
11/13/2012	1:41:50 PM	H2 MFC set to  0.000000
11/13/2012	1:41:50 PM	BCl3 MFC set to  0.000000
11/13/2012	1:41:50 PM	PH3 MFC set to  0.000000
11/13/2012	1:41:50 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:41:50 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:41:50 PM	Tube furnace set to 200
11/13/2012	1:42:20 PM	H2 valve closed
11/13/2012	1:42:20 PM	BCl3 valve closed
11/13/2012	1:42:20 PM	PH3 valve closed
11/13/2012	1:42:20 PM	SiCl4 pre valve closed
11/13/2012	1:42:20 PM	SiCl4 post valve closed
11/13/2012	1:42:20 PM	Bypass valve closed
11/13/2012	1:42:20 PM	Bubbler valve closed
11/13/2012	1:42:20 PM	Helium valve opened
11/13/2012	1:42:20 PM	Main Vac valve opened
11/13/2012	1:42:20 PM	Helium MFC set to  20.000000
11/13/2012	1:42:20 PM	H2 MFC set to  0.000000
11/13/2012	1:42:20 PM	BCl3 MFC set to  0.000000
11/13/2012	1:42:20 PM	PH3 MFC set to  0.000000
11/13/2012	1:42:20 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:42:20 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:42:20 PM	Tube furnace set to 200
11/13/2012	1:42:50 PM	Helium valve closed
11/13/2012	1:42:50 PM	H2 valve closed
11/13/2012	1:42:50 PM	BCl3 valve closed
11/13/2012	1:42:50 PM	PH3 valve closed
11/13/2012	1:42:50 PM	SiCl4 pre valve closed
11/13/2012	1:42:50 PM	SiCl4 post valve closed
11/13/2012	1:42:50 PM	Bypass valve closed
11/13/2012	1:42:50 PM	Bubbler valve closed
11/13/2012	1:42:50 PM	Main Vac valve opened
11/13/2012	1:42:50 PM	Helium MFC set to  0.000000
11/13/2012	1:42:50 PM	H2 MFC set to  0.000000
11/13/2012	1:42:50 PM	BCl3 MFC set to  0.000000
11/13/2012	1:42:50 PM	PH3 MFC set to  0.000000
11/13/2012	1:42:50 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:42:50 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:42:50 PM	Tube furnace set to 200
11/13/2012	1:43:20 PM	H2 valve closed
11/13/2012	1:43:20 PM	BCl3 valve closed
11/13/2012	1:43:20 PM	PH3 valve closed
11/13/2012	1:43:20 PM	SiCl4 pre valve closed
11/13/2012	1:43:20 PM	SiCl4 post valve closed
11/13/2012	1:43:20 PM	Bypass valve closed
11/13/2012	1:43:20 PM	Bubbler valve closed
11/13/2012	1:43:20 PM	Helium valve opened
11/13/2012	1:43:20 PM	Main Vac valve opened
11/13/2012	1:43:20 PM	Helium MFC set to  20.000000
11/13/2012	1:43:20 PM	H2 MFC set to  0.000000
11/13/2012	1:43:20 PM	BCl3 MFC set to  0.000000
11/13/2012	1:43:20 PM	PH3 MFC set to  0.000000
11/13/2012	1:43:20 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:43:20 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:43:21 PM	Tube furnace set to 200
11/13/2012	1:43:51 PM	Helium valve closed
11/13/2012	1:43:51 PM	H2 valve closed
11/13/2012	1:43:51 PM	BCl3 valve closed
11/13/2012	1:43:51 PM	PH3 valve closed
11/13/2012	1:43:51 PM	SiCl4 pre valve closed
11/13/2012	1:43:51 PM	SiCl4 post valve closed
11/13/2012	1:43:51 PM	Bypass valve closed
11/13/2012	1:43:51 PM	Bubbler valve closed
11/13/2012	1:43:51 PM	Main Vac valve opened
11/13/2012	1:43:51 PM	Helium MFC set to  0.000000
11/13/2012	1:43:51 PM	H2 MFC set to  0.000000
11/13/2012	1:43:51 PM	BCl3 MFC set to  0.000000
11/13/2012	1:43:51 PM	PH3 MFC set to  0.000000
11/13/2012	1:43:51 PM	SiCl4 MFC set to  0.000000
11/13/2012	1:43:51 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	1:43:51 PM	Tube furnace set to 0
11/13/2012	1:43:52 PM	Run finished at 1:43 PM
11/13/2012	2:00:55 PM	Main Vac valve closed
11/13/2012	2:01:05 PM	Main Vac valve opened
11/13/2012	2:02:45 PM	Recipe started at 2:02 PM
11/13/2012	2:02:45 PM	Helium valve closed
11/13/2012	2:02:45 PM	H2 valve closed
11/13/2012	2:02:45 PM	BCl3 valve closed
11/13/2012	2:02:45 PM	PH3 valve closed
11/13/2012	2:02:45 PM	SiCl4 pre valve closed
11/13/2012	2:02:45 PM	SiCl4 post valve closed
11/13/2012	2:02:45 PM	Main Vac valve closed
11/13/2012	2:02:45 PM	Bypass valve closed
11/13/2012	2:02:45 PM	Bubbler valve closed
11/13/2012	2:02:45 PM	Helium MFC set to  0.000000
11/13/2012	2:02:45 PM	H2 MFC set to  0.000000
11/13/2012	2:02:45 PM	BCl3 MFC set to  0.000000
11/13/2012	2:02:45 PM	PH3 MFC set to  0.000000
11/13/2012	2:02:45 PM	SiCl4 MFC set to  0.000000
11/13/2012	2:02:45 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	2:02:45 PM	Tube furnace set to 0
11/13/2012	2:02:48 PM	Helium valve closed
11/13/2012	2:02:48 PM	BCl3 valve closed
11/13/2012	2:02:48 PM	PH3 valve closed
11/13/2012	2:02:48 PM	SiCl4 pre valve closed
11/13/2012	2:02:48 PM	SiCl4 post valve closed
11/13/2012	2:02:48 PM	Main Vac valve closed
11/13/2012	2:02:48 PM	Bypass valve closed
11/13/2012	2:02:48 PM	Bubbler valve closed
11/13/2012	2:02:48 PM	H2 valve opened
11/13/2012	2:02:48 PM	Helium MFC set to  0.000000
11/13/2012	2:02:48 PM	H2 MFC set to  500.000000
11/13/2012	2:02:48 PM	BCl3 MFC set to  0.000000
11/13/2012	2:02:48 PM	PH3 MFC set to  0.000000
11/13/2012	2:02:48 PM	SiCl4 MFC set to  0.000000
11/13/2012	2:02:48 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	2:02:49 PM	Tube furnace set to 0
11/13/2012	2:04:02 PM	Helium valve closed
11/13/2012	2:04:02 PM	BCl3 valve closed
11/13/2012	2:04:02 PM	PH3 valve closed
11/13/2012	2:04:02 PM	SiCl4 pre valve closed
11/13/2012	2:04:02 PM	SiCl4 post valve closed
11/13/2012	2:04:02 PM	Main Vac valve closed
11/13/2012	2:04:02 PM	Bypass valve closed
11/13/2012	2:04:02 PM	H2 valve opened
11/13/2012	2:04:02 PM	Bubbler valve opened
11/13/2012	2:04:02 PM	Helium MFC set to  0.000000
11/13/2012	2:04:02 PM	H2 MFC set to  500.000000
11/13/2012	2:04:02 PM	BCl3 MFC set to  0.000000
11/13/2012	2:04:02 PM	PH3 MFC set to  0.000000
11/13/2012	2:04:02 PM	SiCl4 MFC set to  0.000000
11/13/2012	2:04:02 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	2:04:02 PM	Tube furnace set to 0
11/13/2012	2:04:03 PM	Helium valve closed
11/13/2012	2:04:03 PM	BCl3 valve closed
11/13/2012	2:04:03 PM	PH3 valve closed
11/13/2012	2:04:03 PM	SiCl4 pre valve closed
11/13/2012	2:04:03 PM	SiCl4 post valve closed
11/13/2012	2:04:03 PM	Main Vac valve closed
11/13/2012	2:04:03 PM	Bypass valve closed
11/13/2012	2:04:03 PM	H2 valve opened
11/13/2012	2:04:03 PM	Bubbler valve opened
11/13/2012	2:04:03 PM	Helium MFC set to  0.000000
11/13/2012	2:04:03 PM	H2 MFC set to  500.000000
11/13/2012	2:04:03 PM	BCl3 MFC set to  0.000000
11/13/2012	2:04:03 PM	PH3 MFC set to  0.000000
11/13/2012	2:04:03 PM	SiCl4 MFC set to  0.000000
11/13/2012	2:04:03 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	2:04:04 PM	Tube furnace set to 1000
11/13/2012	2:24:04 PM	Helium valve closed
11/13/2012	2:24:04 PM	PH3 valve closed
11/13/2012	2:24:04 PM	Main Vac valve closed
11/13/2012	2:24:04 PM	Bypass valve closed
11/13/2012	2:24:04 PM	H2 valve opened
11/13/2012	2:24:04 PM	BCl3 valve opened
11/13/2012	2:24:04 PM	SiCl4 pre valve opened
11/13/2012	2:24:04 PM	SiCl4 post valve opened
11/13/2012	2:24:04 PM	Bubbler valve opened
11/13/2012	2:24:04 PM	Helium MFC set to  0.000000
11/13/2012	2:24:04 PM	H2 MFC set to  450.000000
11/13/2012	2:24:04 PM	BCl3 MFC set to  1.300000
11/13/2012	2:24:04 PM	PH3 MFC set to  0.000000
11/13/2012	2:24:04 PM	SiCl4 MFC set to  50.000000
11/13/2012	2:24:04 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	2:24:04 PM	Tube furnace set to 1000
11/13/2012	2:38:04 PM	Helium valve closed
11/13/2012	2:38:04 PM	BCl3 valve closed
11/13/2012	2:38:04 PM	PH3 valve closed
11/13/2012	2:38:04 PM	SiCl4 pre valve closed
11/13/2012	2:38:04 PM	SiCl4 post valve closed
11/13/2012	2:38:04 PM	Main Vac valve closed
11/13/2012	2:38:04 PM	Bypass valve closed
11/13/2012	2:38:04 PM	H2 valve opened
11/13/2012	2:38:04 PM	Bubbler valve opened
11/13/2012	2:38:04 PM	Helium MFC set to  0.000000
11/13/2012	2:38:04 PM	H2 MFC set to  500.000000
11/13/2012	2:38:04 PM	BCl3 MFC set to  0.000000
11/13/2012	2:38:04 PM	PH3 MFC set to  0.000000
11/13/2012	2:38:04 PM	SiCl4 MFC set to  0.000000
11/13/2012	2:38:04 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	2:38:04 PM	Tube furnace set to 950
11/13/2012	2:40:04 PM	Helium valve closed
11/13/2012	2:40:04 PM	BCl3 valve closed
11/13/2012	2:40:04 PM	PH3 valve closed
11/13/2012	2:40:04 PM	SiCl4 pre valve closed
11/13/2012	2:40:04 PM	SiCl4 post valve closed
11/13/2012	2:40:04 PM	Main Vac valve closed
11/13/2012	2:40:04 PM	Bypass valve closed
11/13/2012	2:40:04 PM	H2 valve opened
11/13/2012	2:40:04 PM	Bubbler valve opened
11/13/2012	2:40:04 PM	Helium MFC set to  0.000000
11/13/2012	2:40:04 PM	H2 MFC set to  500.000000
11/13/2012	2:40:04 PM	BCl3 MFC set to  0.000000
11/13/2012	2:40:04 PM	PH3 MFC set to  0.000000
11/13/2012	2:40:04 PM	SiCl4 MFC set to  0.000000
11/13/2012	2:40:04 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	2:40:04 PM	Tube furnace set to 900
11/13/2012	2:42:04 PM	Helium valve closed
11/13/2012	2:42:04 PM	BCl3 valve closed
11/13/2012	2:42:04 PM	PH3 valve closed
11/13/2012	2:42:04 PM	SiCl4 pre valve closed
11/13/2012	2:42:04 PM	SiCl4 post valve closed
11/13/2012	2:42:04 PM	Main Vac valve closed
11/13/2012	2:42:04 PM	Bypass valve closed
11/13/2012	2:42:04 PM	H2 valve opened
11/13/2012	2:42:04 PM	Bubbler valve opened
11/13/2012	2:42:04 PM	Helium MFC set to  0.000000
11/13/2012	2:42:04 PM	H2 MFC set to  500.000000
11/13/2012	2:42:04 PM	BCl3 MFC set to  0.000000
11/13/2012	2:42:04 PM	PH3 MFC set to  0.000000
11/13/2012	2:42:04 PM	SiCl4 MFC set to  0.000000
11/13/2012	2:42:04 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	2:42:05 PM	Tube furnace set to 850
11/13/2012	2:44:05 PM	H2 valve closed
11/13/2012	2:44:05 PM	BCl3 valve closed
11/13/2012	2:44:05 PM	PH3 valve closed
11/13/2012	2:44:05 PM	SiCl4 pre valve closed
11/13/2012	2:44:05 PM	SiCl4 post valve closed
11/13/2012	2:44:05 PM	Main Vac valve closed
11/13/2012	2:44:05 PM	Bypass valve closed
11/13/2012	2:44:05 PM	Helium valve opened
11/13/2012	2:44:05 PM	Bubbler valve opened
11/13/2012	2:44:05 PM	Helium MFC set to  500.000000
11/13/2012	2:44:05 PM	H2 MFC set to  0.000000
11/13/2012	2:44:05 PM	BCl3 MFC set to  0.000000
11/13/2012	2:44:05 PM	PH3 MFC set to  0.000000
11/13/2012	2:44:05 PM	SiCl4 MFC set to  0.000000
11/13/2012	2:44:05 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	2:44:05 PM	Tube furnace set to 800
11/13/2012	2:46:05 PM	H2 valve closed
11/13/2012	2:46:05 PM	BCl3 valve closed
11/13/2012	2:46:05 PM	PH3 valve closed
11/13/2012	2:46:05 PM	SiCl4 pre valve closed
11/13/2012	2:46:05 PM	SiCl4 post valve closed
11/13/2012	2:46:05 PM	Main Vac valve closed
11/13/2012	2:46:05 PM	Bypass valve closed
11/13/2012	2:46:05 PM	Helium valve opened
11/13/2012	2:46:05 PM	Bubbler valve opened
11/13/2012	2:46:05 PM	Helium MFC set to  500.000000
11/13/2012	2:46:05 PM	H2 MFC set to  0.000000
11/13/2012	2:46:05 PM	BCl3 MFC set to  0.000000
11/13/2012	2:46:05 PM	PH3 MFC set to  0.000000
11/13/2012	2:46:05 PM	SiCl4 MFC set to  0.000000
11/13/2012	2:46:05 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	2:46:05 PM	Tube furnace set to 750
11/13/2012	2:48:05 PM	H2 valve closed
11/13/2012	2:48:05 PM	BCl3 valve closed
11/13/2012	2:48:05 PM	PH3 valve closed
11/13/2012	2:48:05 PM	SiCl4 pre valve closed
11/13/2012	2:48:05 PM	SiCl4 post valve closed
11/13/2012	2:48:05 PM	Main Vac valve closed
11/13/2012	2:48:05 PM	Bypass valve closed
11/13/2012	2:48:05 PM	Helium valve opened
11/13/2012	2:48:05 PM	Bubbler valve opened
11/13/2012	2:48:05 PM	Helium MFC set to  500.000000
11/13/2012	2:48:05 PM	H2 MFC set to  0.000000
11/13/2012	2:48:05 PM	BCl3 MFC set to  0.000000
11/13/2012	2:48:05 PM	PH3 MFC set to  0.000000
11/13/2012	2:48:05 PM	SiCl4 MFC set to  0.000000
11/13/2012	2:48:05 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	2:48:05 PM	Tube furnace set to 0
11/13/2012	3:08:05 PM	Helium valve closed
11/13/2012	3:08:05 PM	H2 valve closed
11/13/2012	3:08:05 PM	BCl3 valve closed
11/13/2012	3:08:05 PM	PH3 valve closed
11/13/2012	3:08:05 PM	SiCl4 pre valve closed
11/13/2012	3:08:05 PM	SiCl4 post valve closed
11/13/2012	3:08:05 PM	Main Vac valve closed
11/13/2012	3:08:05 PM	Bypass valve closed
11/13/2012	3:08:05 PM	Bubbler valve closed
11/13/2012	3:08:05 PM	Helium MFC set to  0.000000
11/13/2012	3:08:05 PM	H2 MFC set to  0.000000
11/13/2012	3:08:05 PM	BCl3 MFC set to  0.000000
11/13/2012	3:08:05 PM	PH3 MFC set to  0.000000
11/13/2012	3:08:05 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:08:05 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:08:06 PM	Tube furnace set to 0
11/13/2012	3:08:07 PM	Helium valve closed
11/13/2012	3:08:07 PM	H2 valve closed
11/13/2012	3:08:07 PM	BCl3 valve closed
11/13/2012	3:08:07 PM	PH3 valve closed
11/13/2012	3:08:07 PM	SiCl4 pre valve closed
11/13/2012	3:08:07 PM	SiCl4 post valve closed
11/13/2012	3:08:07 PM	Main Vac valve closed
11/13/2012	3:08:07 PM	Bubbler valve closed
11/13/2012	3:08:07 PM	Bypass valve opened
11/13/2012	3:08:07 PM	Helium MFC set to  0.000000
11/13/2012	3:08:07 PM	H2 MFC set to  0.000000
11/13/2012	3:08:07 PM	BCl3 MFC set to  0.000000
11/13/2012	3:08:07 PM	PH3 MFC set to  0.000000
11/13/2012	3:08:07 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:08:07 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:08:07 PM	Tube furnace set to 0
11/13/2012	3:09:00 PM	Helium valve closed
11/13/2012	3:09:00 PM	H2 valve closed
11/13/2012	3:09:00 PM	BCl3 valve closed
11/13/2012	3:09:00 PM	PH3 valve closed
11/13/2012	3:09:00 PM	SiCl4 pre valve closed
11/13/2012	3:09:00 PM	SiCl4 post valve closed
11/13/2012	3:09:00 PM	Main Vac valve closed
11/13/2012	3:09:00 PM	Bubbler valve closed
11/13/2012	3:09:00 PM	Bypass valve opened
11/13/2012	3:09:00 PM	Helium MFC set to  0.000000
11/13/2012	3:09:00 PM	H2 MFC set to  0.000000
11/13/2012	3:09:00 PM	BCl3 MFC set to  0.000000
11/13/2012	3:09:00 PM	PH3 MFC set to  0.000000
11/13/2012	3:09:00 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:09:00 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:09:00 PM	Tube furnace set to 0
11/13/2012	3:10:00 PM	Helium valve closed
11/13/2012	3:10:00 PM	H2 valve closed
11/13/2012	3:10:00 PM	BCl3 valve closed
11/13/2012	3:10:00 PM	PH3 valve closed
11/13/2012	3:10:00 PM	SiCl4 pre valve closed
11/13/2012	3:10:00 PM	SiCl4 post valve closed
11/13/2012	3:10:00 PM	Bypass valve closed
11/13/2012	3:10:00 PM	Bubbler valve closed
11/13/2012	3:10:00 PM	Main Vac valve opened
11/13/2012	3:10:00 PM	Helium MFC set to  0.000000
11/13/2012	3:10:00 PM	H2 MFC set to  0.000000
11/13/2012	3:10:00 PM	BCl3 MFC set to  0.000000
11/13/2012	3:10:00 PM	PH3 MFC set to  0.000000
11/13/2012	3:10:00 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:10:00 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:10:00 PM	Tube furnace set to 0
11/13/2012	3:10:01 PM	Run finished at 3:10 PM
11/13/2012	3:28:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2012	3:28:40 PM	Recipe started at 3:28 PM
11/13/2012	3:28:40 PM	Helium valve closed
11/13/2012	3:28:40 PM	H2 valve closed
11/13/2012	3:28:40 PM	BCl3 valve closed
11/13/2012	3:28:40 PM	PH3 valve closed
11/13/2012	3:28:40 PM	SiCl4 pre valve closed
11/13/2012	3:28:40 PM	SiCl4 post valve closed
11/13/2012	3:28:40 PM	Main Vac valve closed
11/13/2012	3:28:40 PM	Bypass valve closed
11/13/2012	3:28:40 PM	Bubbler valve closed
11/13/2012	3:28:40 PM	Helium MFC set to  0.000000
11/13/2012	3:28:40 PM	H2 MFC set to  0.000000
11/13/2012	3:28:40 PM	BCl3 MFC set to  0.000000
11/13/2012	3:28:40 PM	PH3 MFC set to  0.000000
11/13/2012	3:28:40 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:28:40 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:28:40 PM	Tube furnace set to 0
11/13/2012	3:28:43 PM	H2 valve closed
11/13/2012	3:28:43 PM	BCl3 valve closed
11/13/2012	3:28:43 PM	PH3 valve closed
11/13/2012	3:28:43 PM	SiCl4 pre valve closed
11/13/2012	3:28:43 PM	SiCl4 post valve closed
11/13/2012	3:28:43 PM	Main Vac valve closed
11/13/2012	3:28:43 PM	Bypass valve closed
11/13/2012	3:28:43 PM	Bubbler valve closed
11/13/2012	3:28:43 PM	Helium valve opened
11/13/2012	3:28:43 PM	Helium MFC set to  500.000000
11/13/2012	3:28:43 PM	H2 MFC set to  0.000000
11/13/2012	3:28:43 PM	BCl3 MFC set to  0.000000
11/13/2012	3:28:43 PM	PH3 MFC set to  0.000000
11/13/2012	3:28:44 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:28:44 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:28:44 PM	Tube furnace set to 0
11/13/2012	3:29:55 PM	Helium valve closed
11/13/2012	3:29:55 PM	H2 valve closed
11/13/2012	3:29:55 PM	BCl3 valve closed
11/13/2012	3:29:55 PM	PH3 valve closed
11/13/2012	3:29:55 PM	SiCl4 pre valve closed
11/13/2012	3:29:55 PM	SiCl4 post valve closed
11/13/2012	3:29:55 PM	Main Vac valve closed
11/13/2012	3:29:55 PM	Bypass valve closed
11/13/2012	3:29:55 PM	Bubbler valve closed
11/13/2012	3:29:55 PM	Helium MFC set to  0.000000
11/13/2012	3:29:55 PM	H2 MFC set to  0.000000
11/13/2012	3:29:55 PM	BCl3 MFC set to  0.000000
11/13/2012	3:29:55 PM	PH3 MFC set to  0.000000
11/13/2012	3:29:55 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:29:55 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:29:55 PM	Tube furnace set to 0
11/13/2012	3:29:56 PM	Run finished at 3:29 PM
11/13/2012	3:29:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2012	3:32:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	3:32:51 PM	Recipe started at 3:32 PM
11/13/2012	3:32:51 PM	Helium valve closed
11/13/2012	3:32:52 PM	H2 valve closed
11/13/2012	3:32:52 PM	BCl3 valve closed
11/13/2012	3:32:52 PM	PH3 valve closed
11/13/2012	3:32:52 PM	SiCl4 pre valve closed
11/13/2012	3:32:52 PM	SiCl4 post valve closed
11/13/2012	3:32:52 PM	Main Vac valve closed
11/13/2012	3:32:52 PM	Bubbler valve closed
11/13/2012	3:32:52 PM	Bypass valve opened
11/13/2012	3:32:52 PM	Helium MFC set to  0.000000
11/13/2012	3:32:52 PM	H2 MFC set to  0.000000
11/13/2012	3:32:52 PM	BCl3 MFC set to  0.000000
11/13/2012	3:32:52 PM	PH3 MFC set to  0.000000
11/13/2012	3:32:52 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:32:52 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:32:52 PM	Tube furnace set to 0
11/13/2012	3:33:59 PM	Helium valve closed
11/13/2012	3:33:59 PM	H2 valve closed
11/13/2012	3:33:59 PM	BCl3 valve closed
11/13/2012	3:33:59 PM	PH3 valve closed
11/13/2012	3:33:59 PM	SiCl4 pre valve closed
11/13/2012	3:33:59 PM	SiCl4 post valve closed
11/13/2012	3:33:59 PM	Main Vac valve closed
11/13/2012	3:33:59 PM	Bubbler valve closed
11/13/2012	3:33:59 PM	Bypass valve opened
11/13/2012	3:33:59 PM	Helium MFC set to  0.000000
11/13/2012	3:33:59 PM	H2 MFC set to  0.000000
11/13/2012	3:33:59 PM	BCl3 MFC set to  0.000000
11/13/2012	3:33:59 PM	PH3 MFC set to  0.000000
11/13/2012	3:33:59 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:33:59 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:33:59 PM	Tube furnace set to 0
11/13/2012	3:34:59 PM	Helium valve closed
11/13/2012	3:34:59 PM	H2 valve closed
11/13/2012	3:34:59 PM	BCl3 valve closed
11/13/2012	3:34:59 PM	PH3 valve closed
11/13/2012	3:34:59 PM	SiCl4 pre valve closed
11/13/2012	3:34:59 PM	SiCl4 post valve closed
11/13/2012	3:34:59 PM	Bypass valve closed
11/13/2012	3:34:59 PM	Bubbler valve closed
11/13/2012	3:34:59 PM	Main Vac valve opened
11/13/2012	3:34:59 PM	Helium MFC set to  0.000000
11/13/2012	3:34:59 PM	H2 MFC set to  0.000000
11/13/2012	3:34:59 PM	BCl3 MFC set to  0.000000
11/13/2012	3:34:59 PM	PH3 MFC set to  0.000000
11/13/2012	3:34:59 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:34:59 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:34:59 PM	Tube furnace set to 0
11/13/2012	3:35:00 PM	Run finished at 3:35 PM
11/13/2012	3:35:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	3:49:04 PM	Main Vac valve closed
11/13/2012	3:49:16 PM	Main Vac valve opened
11/13/2012	3:49:59 PM	Main Vac valve closed
11/13/2012	3:50:13 PM	Main Vac valve opened
11/13/2012	3:50:30 PM	Recipe started at 3:50 PM
11/13/2012	3:50:30 PM	Helium valve closed
11/13/2012	3:50:30 PM	H2 valve closed
11/13/2012	3:50:30 PM	BCl3 valve closed
11/13/2012	3:50:30 PM	PH3 valve closed
11/13/2012	3:50:30 PM	SiCl4 pre valve closed
11/13/2012	3:50:30 PM	SiCl4 post valve closed
11/13/2012	3:50:30 PM	Main Vac valve closed
11/13/2012	3:50:30 PM	Bypass valve closed
11/13/2012	3:50:30 PM	Bubbler valve closed
11/13/2012	3:50:30 PM	Helium MFC set to  0.000000
11/13/2012	3:50:30 PM	H2 MFC set to  0.000000
11/13/2012	3:50:30 PM	BCl3 MFC set to  0.000000
11/13/2012	3:50:31 PM	PH3 MFC set to  0.000000
11/13/2012	3:50:31 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:50:31 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:50:31 PM	Tube furnace set to 0
11/13/2012	3:50:34 PM	Helium valve closed
11/13/2012	3:50:34 PM	BCl3 valve closed
11/13/2012	3:50:34 PM	PH3 valve closed
11/13/2012	3:50:34 PM	SiCl4 pre valve closed
11/13/2012	3:50:34 PM	SiCl4 post valve closed
11/13/2012	3:50:34 PM	Main Vac valve closed
11/13/2012	3:50:34 PM	Bypass valve closed
11/13/2012	3:50:34 PM	Bubbler valve closed
11/13/2012	3:50:34 PM	H2 valve opened
11/13/2012	3:50:34 PM	Helium MFC set to  0.000000
11/13/2012	3:50:34 PM	H2 MFC set to  500.000000
11/13/2012	3:50:34 PM	BCl3 MFC set to  0.000000
11/13/2012	3:50:34 PM	PH3 MFC set to  0.000000
11/13/2012	3:50:34 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:50:34 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:50:34 PM	Tube furnace set to 0
11/13/2012	3:51:47 PM	Helium valve closed
11/13/2012	3:51:47 PM	BCl3 valve closed
11/13/2012	3:51:47 PM	PH3 valve closed
11/13/2012	3:51:47 PM	SiCl4 pre valve closed
11/13/2012	3:51:47 PM	SiCl4 post valve closed
11/13/2012	3:51:47 PM	Main Vac valve closed
11/13/2012	3:51:47 PM	Bypass valve closed
11/13/2012	3:51:47 PM	H2 valve opened
11/13/2012	3:51:47 PM	Bubbler valve opened
11/13/2012	3:51:47 PM	Helium MFC set to  0.000000
11/13/2012	3:51:47 PM	H2 MFC set to  500.000000
11/13/2012	3:51:47 PM	BCl3 MFC set to  0.000000
11/13/2012	3:51:47 PM	PH3 MFC set to  0.000000
11/13/2012	3:51:47 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:51:47 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:51:47 PM	Tube furnace set to 0
11/13/2012	3:51:48 PM	Helium valve closed
11/13/2012	3:51:48 PM	BCl3 valve closed
11/13/2012	3:51:48 PM	PH3 valve closed
11/13/2012	3:51:48 PM	SiCl4 pre valve closed
11/13/2012	3:51:48 PM	SiCl4 post valve closed
11/13/2012	3:51:48 PM	Main Vac valve closed
11/13/2012	3:51:48 PM	Bypass valve closed
11/13/2012	3:51:48 PM	H2 valve opened
11/13/2012	3:51:48 PM	Bubbler valve opened
11/13/2012	3:51:48 PM	Helium MFC set to  0.000000
11/13/2012	3:51:48 PM	H2 MFC set to  500.000000
11/13/2012	3:51:48 PM	BCl3 MFC set to  0.000000
11/13/2012	3:51:48 PM	PH3 MFC set to  0.000000
11/13/2012	3:51:48 PM	SiCl4 MFC set to  0.000000
11/13/2012	3:51:48 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	3:51:48 PM	Tube furnace set to 1000
11/13/2012	4:11:48 PM	Helium valve closed
11/13/2012	4:11:48 PM	PH3 valve closed
11/13/2012	4:11:48 PM	Main Vac valve closed
11/13/2012	4:11:48 PM	Bypass valve closed
11/13/2012	4:11:48 PM	H2 valve opened
11/13/2012	4:11:48 PM	BCl3 valve opened
11/13/2012	4:11:48 PM	SiCl4 pre valve opened
11/13/2012	4:11:48 PM	SiCl4 post valve opened
11/13/2012	4:11:48 PM	Bubbler valve opened
11/13/2012	4:11:48 PM	Helium MFC set to  0.000000
11/13/2012	4:11:48 PM	H2 MFC set to  450.000000
11/13/2012	4:11:48 PM	BCl3 MFC set to  1.300000
11/13/2012	4:11:48 PM	PH3 MFC set to  0.000000
11/13/2012	4:11:48 PM	SiCl4 MFC set to  50.000000
11/13/2012	4:11:48 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	4:11:49 PM	Tube furnace set to 1000
11/13/2012	4:25:49 PM	Helium valve closed
11/13/2012	4:25:49 PM	BCl3 valve closed
11/13/2012	4:25:49 PM	PH3 valve closed
11/13/2012	4:25:49 PM	SiCl4 pre valve closed
11/13/2012	4:25:49 PM	SiCl4 post valve closed
11/13/2012	4:25:49 PM	Main Vac valve closed
11/13/2012	4:25:49 PM	Bypass valve closed
11/13/2012	4:25:49 PM	H2 valve opened
11/13/2012	4:25:49 PM	Bubbler valve opened
11/13/2012	4:25:49 PM	Helium MFC set to  0.000000
11/13/2012	4:25:49 PM	H2 MFC set to  500.000000
11/13/2012	4:25:49 PM	BCl3 MFC set to  0.000000
11/13/2012	4:25:49 PM	PH3 MFC set to  0.000000
11/13/2012	4:25:49 PM	SiCl4 MFC set to  0.000000
11/13/2012	4:25:49 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	4:25:49 PM	Tube furnace set to 950
11/13/2012	4:27:49 PM	Helium valve closed
11/13/2012	4:27:49 PM	BCl3 valve closed
11/13/2012	4:27:49 PM	PH3 valve closed
11/13/2012	4:27:49 PM	SiCl4 pre valve closed
11/13/2012	4:27:49 PM	SiCl4 post valve closed
11/13/2012	4:27:49 PM	Main Vac valve closed
11/13/2012	4:27:49 PM	Bypass valve closed
11/13/2012	4:27:49 PM	H2 valve opened
11/13/2012	4:27:49 PM	Bubbler valve opened
11/13/2012	4:27:49 PM	Helium MFC set to  0.000000
11/13/2012	4:27:49 PM	H2 MFC set to  500.000000
11/13/2012	4:27:49 PM	BCl3 MFC set to  0.000000
11/13/2012	4:27:49 PM	PH3 MFC set to  0.000000
11/13/2012	4:27:49 PM	SiCl4 MFC set to  0.000000
11/13/2012	4:27:49 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	4:27:49 PM	Tube furnace set to 900
11/13/2012	4:29:49 PM	Helium valve closed
11/13/2012	4:29:49 PM	BCl3 valve closed
11/13/2012	4:29:49 PM	PH3 valve closed
11/13/2012	4:29:49 PM	SiCl4 pre valve closed
11/13/2012	4:29:49 PM	SiCl4 post valve closed
11/13/2012	4:29:49 PM	Main Vac valve closed
11/13/2012	4:29:49 PM	Bypass valve closed
11/13/2012	4:29:49 PM	H2 valve opened
11/13/2012	4:29:49 PM	Bubbler valve opened
11/13/2012	4:29:49 PM	Helium MFC set to  0.000000
11/13/2012	4:29:49 PM	H2 MFC set to  500.000000
11/13/2012	4:29:49 PM	BCl3 MFC set to  0.000000
11/13/2012	4:29:49 PM	PH3 MFC set to  0.000000
11/13/2012	4:29:49 PM	SiCl4 MFC set to  0.000000
11/13/2012	4:29:49 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	4:29:49 PM	Tube furnace set to 850
11/13/2012	4:31:49 PM	H2 valve closed
11/13/2012	4:31:49 PM	BCl3 valve closed
11/13/2012	4:31:49 PM	PH3 valve closed
11/13/2012	4:31:49 PM	SiCl4 pre valve closed
11/13/2012	4:31:49 PM	SiCl4 post valve closed
11/13/2012	4:31:49 PM	Main Vac valve closed
11/13/2012	4:31:49 PM	Bypass valve closed
11/13/2012	4:31:49 PM	Helium valve opened
11/13/2012	4:31:49 PM	Bubbler valve opened
11/13/2012	4:31:49 PM	Helium MFC set to  500.000000
11/13/2012	4:31:49 PM	H2 MFC set to  0.000000
11/13/2012	4:31:49 PM	BCl3 MFC set to  0.000000
11/13/2012	4:31:49 PM	PH3 MFC set to  0.000000
11/13/2012	4:31:50 PM	SiCl4 MFC set to  0.000000
11/13/2012	4:31:50 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	4:31:50 PM	Tube furnace set to 800
11/13/2012	4:33:50 PM	H2 valve closed
11/13/2012	4:33:50 PM	BCl3 valve closed
11/13/2012	4:33:50 PM	PH3 valve closed
11/13/2012	4:33:50 PM	SiCl4 pre valve closed
11/13/2012	4:33:50 PM	SiCl4 post valve closed
11/13/2012	4:33:50 PM	Main Vac valve closed
11/13/2012	4:33:50 PM	Bypass valve closed
11/13/2012	4:33:50 PM	Helium valve opened
11/13/2012	4:33:50 PM	Bubbler valve opened
11/13/2012	4:33:50 PM	Helium MFC set to  500.000000
11/13/2012	4:33:50 PM	H2 MFC set to  0.000000
11/13/2012	4:33:50 PM	BCl3 MFC set to  0.000000
11/13/2012	4:33:50 PM	PH3 MFC set to  0.000000
11/13/2012	4:33:50 PM	SiCl4 MFC set to  0.000000
11/13/2012	4:33:50 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	4:33:50 PM	Tube furnace set to 750
11/13/2012	4:35:50 PM	H2 valve closed
11/13/2012	4:35:50 PM	BCl3 valve closed
11/13/2012	4:35:50 PM	PH3 valve closed
11/13/2012	4:35:50 PM	SiCl4 pre valve closed
11/13/2012	4:35:50 PM	SiCl4 post valve closed
11/13/2012	4:35:50 PM	Main Vac valve closed
11/13/2012	4:35:50 PM	Bypass valve closed
11/13/2012	4:35:50 PM	Helium valve opened
11/13/2012	4:35:50 PM	Bubbler valve opened
11/13/2012	4:35:50 PM	Helium MFC set to  500.000000
11/13/2012	4:35:50 PM	H2 MFC set to  0.000000
11/13/2012	4:35:50 PM	BCl3 MFC set to  0.000000
11/13/2012	4:35:50 PM	PH3 MFC set to  0.000000
11/13/2012	4:35:50 PM	SiCl4 MFC set to  0.000000
11/13/2012	4:35:50 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	4:35:50 PM	Tube furnace set to 0
11/13/2012	4:55:50 PM	Helium valve closed
11/13/2012	4:55:50 PM	H2 valve closed
11/13/2012	4:55:50 PM	BCl3 valve closed
11/13/2012	4:55:50 PM	PH3 valve closed
11/13/2012	4:55:50 PM	SiCl4 pre valve closed
11/13/2012	4:55:50 PM	SiCl4 post valve closed
11/13/2012	4:55:50 PM	Main Vac valve closed
11/13/2012	4:55:50 PM	Bypass valve closed
11/13/2012	4:55:50 PM	Bubbler valve closed
11/13/2012	4:55:50 PM	Helium MFC set to  0.000000
11/13/2012	4:55:50 PM	H2 MFC set to  0.000000
11/13/2012	4:55:50 PM	BCl3 MFC set to  0.000000
11/13/2012	4:55:50 PM	PH3 MFC set to  0.000000
11/13/2012	4:55:50 PM	SiCl4 MFC set to  0.000000
11/13/2012	4:55:50 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	4:55:50 PM	Tube furnace set to 0
11/13/2012	4:55:51 PM	Helium valve closed
11/13/2012	4:55:51 PM	H2 valve closed
11/13/2012	4:55:51 PM	BCl3 valve closed
11/13/2012	4:55:51 PM	PH3 valve closed
11/13/2012	4:55:51 PM	SiCl4 pre valve closed
11/13/2012	4:55:51 PM	SiCl4 post valve closed
11/13/2012	4:55:51 PM	Main Vac valve closed
11/13/2012	4:55:51 PM	Bubbler valve closed
11/13/2012	4:55:51 PM	Bypass valve opened
11/13/2012	4:55:51 PM	Helium MFC set to  0.000000
11/13/2012	4:55:51 PM	H2 MFC set to  0.000000
11/13/2012	4:55:51 PM	BCl3 MFC set to  0.000000
11/13/2012	4:55:51 PM	PH3 MFC set to  0.000000
11/13/2012	4:55:51 PM	SiCl4 MFC set to  0.000000
11/13/2012	4:55:51 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	4:55:52 PM	Tube furnace set to 0
11/13/2012	4:56:44 PM	Helium valve closed
11/13/2012	4:56:44 PM	H2 valve closed
11/13/2012	4:56:44 PM	BCl3 valve closed
11/13/2012	4:56:44 PM	PH3 valve closed
11/13/2012	4:56:44 PM	SiCl4 pre valve closed
11/13/2012	4:56:44 PM	SiCl4 post valve closed
11/13/2012	4:56:44 PM	Main Vac valve closed
11/13/2012	4:56:44 PM	Bubbler valve closed
11/13/2012	4:56:44 PM	Bypass valve opened
11/13/2012	4:56:44 PM	Helium MFC set to  0.000000
11/13/2012	4:56:44 PM	H2 MFC set to  0.000000
11/13/2012	4:56:44 PM	BCl3 MFC set to  0.000000
11/13/2012	4:56:44 PM	PH3 MFC set to  0.000000
11/13/2012	4:56:44 PM	SiCl4 MFC set to  0.000000
11/13/2012	4:56:44 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	4:56:44 PM	Tube furnace set to 0
11/13/2012	4:57:44 PM	Helium valve closed
11/13/2012	4:57:44 PM	H2 valve closed
11/13/2012	4:57:44 PM	BCl3 valve closed
11/13/2012	4:57:44 PM	PH3 valve closed
11/13/2012	4:57:44 PM	SiCl4 pre valve closed
11/13/2012	4:57:44 PM	SiCl4 post valve closed
11/13/2012	4:57:44 PM	Bypass valve closed
11/13/2012	4:57:44 PM	Bubbler valve closed
11/13/2012	4:57:44 PM	Main Vac valve opened
11/13/2012	4:57:44 PM	Helium MFC set to  0.000000
11/13/2012	4:57:44 PM	H2 MFC set to  0.000000
11/13/2012	4:57:44 PM	BCl3 MFC set to  0.000000
11/13/2012	4:57:44 PM	PH3 MFC set to  0.000000
11/13/2012	4:57:44 PM	SiCl4 MFC set to  0.000000
11/13/2012	4:57:44 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	4:57:45 PM	Tube furnace set to 0
11/13/2012	4:57:46 PM	Run finished at 4:57 PM
11/13/2012	5:05:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2012	5:05:15 PM	Recipe started at 5:05 PM
11/13/2012	5:05:15 PM	Helium valve closed
11/13/2012	5:05:15 PM	H2 valve closed
11/13/2012	5:05:15 PM	BCl3 valve closed
11/13/2012	5:05:15 PM	PH3 valve closed
11/13/2012	5:05:15 PM	SiCl4 pre valve closed
11/13/2012	5:05:15 PM	SiCl4 post valve closed
11/13/2012	5:05:15 PM	Main Vac valve closed
11/13/2012	5:05:15 PM	Bypass valve closed
11/13/2012	5:05:15 PM	Bubbler valve closed
11/13/2012	5:05:15 PM	Helium MFC set to  0.000000
11/13/2012	5:05:15 PM	H2 MFC set to  0.000000
11/13/2012	5:05:15 PM	BCl3 MFC set to  0.000000
11/13/2012	5:05:15 PM	PH3 MFC set to  0.000000
11/13/2012	5:05:15 PM	SiCl4 MFC set to  0.000000
11/13/2012	5:05:15 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	5:05:15 PM	Tube furnace set to 0
11/13/2012	5:05:18 PM	H2 valve closed
11/13/2012	5:05:18 PM	BCl3 valve closed
11/13/2012	5:05:18 PM	PH3 valve closed
11/13/2012	5:05:18 PM	SiCl4 pre valve closed
11/13/2012	5:05:18 PM	SiCl4 post valve closed
11/13/2012	5:05:18 PM	Main Vac valve closed
11/13/2012	5:05:18 PM	Bypass valve closed
11/13/2012	5:05:18 PM	Bubbler valve closed
11/13/2012	5:05:18 PM	Helium valve opened
11/13/2012	5:05:18 PM	Helium MFC set to  500.000000
11/13/2012	5:05:18 PM	H2 MFC set to  0.000000
11/13/2012	5:05:18 PM	BCl3 MFC set to  0.000000
11/13/2012	5:05:18 PM	PH3 MFC set to  0.000000
11/13/2012	5:05:18 PM	SiCl4 MFC set to  0.000000
11/13/2012	5:05:18 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	5:05:19 PM	Tube furnace set to 0
11/13/2012	5:06:29 PM	Helium valve closed
11/13/2012	5:06:29 PM	H2 valve closed
11/13/2012	5:06:29 PM	BCl3 valve closed
11/13/2012	5:06:29 PM	PH3 valve closed
11/13/2012	5:06:29 PM	SiCl4 pre valve closed
11/13/2012	5:06:29 PM	SiCl4 post valve closed
11/13/2012	5:06:29 PM	Main Vac valve closed
11/13/2012	5:06:29 PM	Bypass valve closed
11/13/2012	5:06:29 PM	Bubbler valve closed
11/13/2012	5:06:29 PM	Helium MFC set to  0.000000
11/13/2012	5:06:29 PM	H2 MFC set to  0.000000
11/13/2012	5:06:29 PM	BCl3 MFC set to  0.000000
11/13/2012	5:06:29 PM	PH3 MFC set to  0.000000
11/13/2012	5:06:29 PM	SiCl4 MFC set to  0.000000
11/13/2012	5:06:29 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	5:06:29 PM	Tube furnace set to 0
11/13/2012	5:06:30 PM	Run finished at 5:06 PM
11/13/2012	5:06:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/13/2012	5:14:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/13/2012	5:14:05 PM	Recipe started at 5:14 PM
11/13/2012	5:14:05 PM	Helium valve closed
11/13/2012	5:14:05 PM	H2 valve closed
11/13/2012	5:14:05 PM	BCl3 valve closed
11/13/2012	5:14:05 PM	PH3 valve closed
11/13/2012	5:14:05 PM	SiCl4 pre valve closed
11/13/2012	5:14:05 PM	SiCl4 post valve closed
11/13/2012	5:14:05 PM	Main Vac valve closed
11/13/2012	5:14:05 PM	Bubbler valve closed
11/13/2012	5:14:05 PM	Bypass valve opened
11/13/2012	5:14:05 PM	Helium MFC set to  0.000000
11/13/2012	5:14:05 PM	H2 MFC set to  0.000000
11/13/2012	5:14:05 PM	BCl3 MFC set to  0.000000
11/13/2012	5:14:05 PM	PH3 MFC set to  0.000000
11/13/2012	5:14:05 PM	SiCl4 MFC set to  0.000000
11/13/2012	5:14:06 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	5:14:06 PM	Tube furnace set to 0
11/13/2012	5:15:10 PM	Helium valve closed
11/13/2012	5:15:10 PM	H2 valve closed
11/13/2012	5:15:10 PM	BCl3 valve closed
11/13/2012	5:15:10 PM	PH3 valve closed
11/13/2012	5:15:10 PM	SiCl4 pre valve closed
11/13/2012	5:15:10 PM	SiCl4 post valve closed
11/13/2012	5:15:10 PM	Main Vac valve closed
11/13/2012	5:15:10 PM	Bubbler valve closed
11/13/2012	5:15:10 PM	Bypass valve opened
11/13/2012	5:15:10 PM	Helium MFC set to  0.000000
11/13/2012	5:15:10 PM	H2 MFC set to  0.000000
11/13/2012	5:15:10 PM	BCl3 MFC set to  0.000000
11/13/2012	5:15:10 PM	PH3 MFC set to  0.000000
11/13/2012	5:15:10 PM	SiCl4 MFC set to  0.000000
11/13/2012	5:15:10 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	5:15:11 PM	Tube furnace set to 0
11/13/2012	5:16:11 PM	Helium valve closed
11/13/2012	5:16:11 PM	H2 valve closed
11/13/2012	5:16:11 PM	BCl3 valve closed
11/13/2012	5:16:11 PM	PH3 valve closed
11/13/2012	5:16:11 PM	SiCl4 pre valve closed
11/13/2012	5:16:11 PM	SiCl4 post valve closed
11/13/2012	5:16:11 PM	Bypass valve closed
11/13/2012	5:16:11 PM	Bubbler valve closed
11/13/2012	5:16:11 PM	Main Vac valve opened
11/13/2012	5:16:11 PM	Helium MFC set to  0.000000
11/13/2012	5:16:11 PM	H2 MFC set to  0.000000
11/13/2012	5:16:11 PM	BCl3 MFC set to  0.000000
11/13/2012	5:16:11 PM	PH3 MFC set to  0.000000
11/13/2012	5:16:11 PM	SiCl4 MFC set to  0.000000
11/13/2012	5:16:11 PM	Bypass solenoid MFC set to  0.000000
11/13/2012	5:16:11 PM	Tube furnace set to 0
11/13/2012	5:16:12 PM	Run finished at 5:16 PM
11/13/2012	5:16:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
